Coplanar Waveguide with Elevated Center Strip Conductor Based on HR-Si Substrate

机译：基于HR-Si基板的高中心带状导体共面波导

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In this paper, an elevated CPW based on high-resistivity silicon is presented. The center strip conductor is elevated on a silicon dioxide layer which can be easily fabricated by thermal oxidation. This extra silicon dioxide layer under the center strip conductor weakens the magnetic-field, which could be validated by the HFSS simulation. Compared with the conven-tional CPW with the center strip and ground planes on the same plane, the elevated CPW's insertion loss can be decreased. The simulated and measured results are in good agreement. And the process flow is compatible with the mainstreamed CMOS technology.

机译：在本文中，提出了一种基于高电阻率硅的升高的CPW。中心带状导体在二氧化硅层上升高，该二氧化硅层可以通过热氧化容易地制造。中心带状导体下方的额外二氧化硅层会削弱磁场，这可以通过HFSS仿真来验证。与中心带和地平面在同一平面上的常规CPW相比，可以减少升高的CPW的插入损耗。仿真和测量结果吻合良好。而且处理流程与主流的CMOS技术兼容。

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来源
《Progress in electromagnetics research symposium 2008 (PIERS 2008)》|2008年|1-4|共4页
会议地点 Hangzhou(CN);Hangzhou(CN)
作者
Xiuzhi Wen; Yanling Shi; Jing Liu; Fuquan Cao; Yanfang Ding; Xi Li; Hao Huang; Hongbo Ye; Linyan Xue;
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正文语种 eng
中图分类电磁学;
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1. Strip-Width and Slot-Gap Dependent Equivalent Isotropic Substrate and Dispersion Characteristics of Asymmetric Coplanar Waveguide, Symmetric Coplanar Waveguide and Micro-Coplanar Strip Line on Anisotropic Substrates [J] . Verma A.K., Singh P., Matekovits L. Microwave Theory and Techniques, IEEE Transactions on . 2014,第10期

机译：条宽和缝隙相关的各向同性基底以及各向异性基底上非对称共面波导，对称共面波导和微共面带状线的色散特性
2. The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides [J] . HÅkan Berg, Spartak Gevorgian International journal of RF and microwave computer-aided engineering . 2000,第5期

机译：纵向衬底电流对硅衬底共面带和共面波导中的损耗的影响
3. Wideband transition from conductor-backed coplanar waveguide to modified coplanar stripline using multiple substrates [J] . Tilley K., Wu X.-D. Electronics Letters . 1993,第23期

机译：使用多个基板从导体支持的共面波导到改性共面带状线的宽带过渡
4. Coplanar Waveguide with Elevated Center Strip Conductor Based on HR-Si Substrate [C] . Xiuzhi Wen, Yanling Shi, Jing Liu, Progress in electromagnetics research symposium . 2008

机译：基于HR-Si衬底的Coplanar波导，具有升高的中心条导体
5. Transmission loss and dispersion in conductor-backed coplanar waveguide. An investigation of waveguide structures for broadband optical modulators. [D] . Sun, Haidong. 2003

机译：背衬导体的共面波导中的传输损耗和色散。对宽带光调制器的波导结构的研究。
6. Reconfigurable Coplanar Waveguide (CPW) and Half-Mode Substrate Integrated Waveguide (HMSIW) Band-Stop Filters Using a Varactor-Loaded Metamaterial-Inspired Open Resonator [O] . Juan Hinojosa, Adrián Saura-Ródenas, Alejandro Alvarez-Melcon, 2018

机译：可变形共面波导（CPW）和半模衬底集成波导（HMSIW）带阻滤波器使用压敏电阻加载超材料激发的开放式谐振器
7. Novel Compact Wide-band Substrate Integrated Waveguide Bandpass Filter using Conductor Backed Coplanar Waveguide as Feed line for W-Band Communication Applications [O] . Aman Kumari, Anand Pratap, Arun Kumar, 2016

机译：新型紧凑型宽带基板集成波导带通滤波器，使用导体支持的共面波导作为用于W波段通信应用的馈线
8. Coplanar Waveguide Fed Coplanar Strip Dipole Antenna [R] . Tilley, K., Wu, X., Chang, K. 1994

机译：共面波导馈电共面条偶极天线

Coplanar Waveguide with Elevated Center Strip Conductor Based on HR-Si Substrate

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