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首页> 外文会议>Progress in functional materials >Fabrication of electroosmotic flow pump on polymethylmethacrylate substrate using hot embossing
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Fabrication of electroosmotic flow pump on polymethylmethacrylate substrate using hot embossing

机译：使用热压花在聚甲基丙烯酸甲酯基底上制备电渗流泵

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摘要

Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was pressed into the PMMA substrate at a temperature of 145 ℃ to form microchannel patterns on the substrate. The depth and width of the microchannels were 50 μm and 100 μm, respectively. Aluminum electrodes were deposited using thermal vacuum deposition. A UV ozone treatment was performed to improve adhesion between the PMMA substrate and a PMMA capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 70 ℃, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.5 μl/min when a voltage of 50 V was given between the electrodes separated 8 mm each other.
机译：描述了使用热压花的微电渗流泵的改进的制造工艺。微型泵中的微通道是通过在聚甲基丙烯酸甲酯（PMMA）基板上进行热压纹而制成的。将硅微机械模具在145℃的温度下压入PMMA基板中，以在基板上形成微通道图案。微通道的深度和宽度分别为50μm和100μm。使用热真空沉积来沉积铝电极。进行紫外线臭氧处理以改善PMMA基板和PMMA覆盖层之间的附着力。这种紫外线臭氧处理增强了附着力，导致附着温度降低至70℃，几乎没有观察到微通道变形。结果，当在彼此分开8mm的电极之间施加50V的电压时，电渗流泵表现出0.5μl/ min的流量。

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  • 来源
    《Progress in functional materials》|2012年|125-128|共4页
  • 会议地点 Shanghai(CN)
  • 作者

    Hirofumi Saito; Hiroki Komatsuzaki; Ryuta Ikoma; Takayuki Komori; Keigo Kuroda; Yohta Kimura; Yudai Fukushi; Hirotaka Maenosono; Syohei Koide; Masahiro Satano; Yasushiro Nishioka;

  • 作者单位

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

    Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Hot embossing; Electroosmotic flow; UV ozone;

    机译：热压纹；电渗流紫外线臭氧;

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