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首页> 外文会议>Progress in plasma processing of materials 1999 >Simulation of the d~3TTg-a~3IIu system (Swan Band) of the C_2 molecule in atmospheric pressure argon ICP for diagnostic of diamond deposition process
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Simulation of the d~3TTg-a~3IIu system (Swan Band) of the C_2 molecule in atmospheric pressure argon ICP for diagnostic of diamond deposition process

机译：大气压氩ICP中C_2分子的d〜3TTg-a〜3IIu系统（天鹅带）的模拟，用于诊断金刚石沉积过程

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摘要

A spectroscopic method using the molecular spectrum of C_2 to determine temperature in diamond chemical vapour deposition processes running at atmospheric pressure has been studied. Under atmospheric pressure conditions, the argon interferences cannot be ignored without inducing important errors. The precise simulation of emission spectra permits a rigorous line selection and background correction. Systematic ocmparison has been done with the values of temeprature obtained using iron spectrum. The resulting method is fast and easy to implement. The temepratures measured from iron and C_2 spectra are close, suggesting that improtant difference between excitation and rotational temperatures sometimes quoted in literature could be due, at least partly, to spectroscopic mistakes.
机译：研究了使用C_2分子光谱确定大气压力下金刚石化学气相沉积过程中温度的光谱方法。在大气压条件下，不能忽略氩气干扰而不会引起重要的误差。发射光谱的精确模拟允许严格的线选择和背景校正。用铁谱测得的三价铁已完成系统的比较。生成的方法快速且易于实现。从铁和C_2光谱测得的温度很接近，这表明有时在文献中引用的激发温度和旋转温度之间的重要差异可能至少部分是由于光谱错误造成的。

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