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Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope

机译:数字全息显微镜中快速移动相物重构相分布的改进

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For defect detection or undesired object in commercial products, it is required to develop a fast measurement system that can obtain three-dimensional distribution of surface of the opaque medium such as metal or inside of the transparent medium. For this purpose, we fabricated a digital holographic microscope using a fast image sensor when the phase object is put on a fast movable stage. In the fabricated system, an image sensor operated at maximum frame rate of 2000 fps and a movable stage operated at maximum speed of 300 mm/s are introduced. Under the continuous wave illumination, motion-blurred phase object is reconstructed. By using numerical processing such as deconvolution filter, the reconstructed phase distribution is much improved. Numerical results are presented.
机译:为了检测商品中的缺陷或不期望的物体,需要开发一种能够获得诸如金属之类的不透明介质的表面或透明介质内部的三维分布的快速测量系统。为此,当将相位对象放置在快速可移动平台上时,我们使用快速图像传感器制造了数字全息显微镜。在装配好的系统中,引入了以2000 fps的最大帧速率运行的图像传感器和以300 mm / s的最大速度运行的可移动平台。在连续波照明下,重建了运动模糊相对象。通过使用反卷积滤波器之类的数值处理,可以大大改善重构的相位分布。给出了数值结果。

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