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首页> 外文会议>Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; Proceedings of SPIE-The International Society for Optical Engineering; vol.6463 >A novel technique for extraction of material properties through measurement of pull-in voltage and off-capacitance of beams
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A novel technique for extraction of material properties through measurement of pull-in voltage and off-capacitance of beams

机译：通过测量梁的引入电压和关断电容来提取材料特性的新技术

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摘要

The mechanical properties of the structural layer play important role in the design and optimization of MEMS structures. The pull-in measurement is a popular technique used to measure the mechanical properties of a material, but its success depends on the accurate measurement of the gap (g) between the beam and the ground plane and its uniformity. In this paper we propose a novel technique which does not require accurate knowledge of the value of 'g'. In our proposed method, a large number of beams with different lengths (L) are to be fabricated simultaneously and the off-Capacitance (C_(off)) in addition to pull-in voltage (V_(pi)) measured in the same set-up. This is followed by a plot of (C_(off)~3V_(pi)~2L~4 /A~3) vs (1/A) for beams under bending dominating condition and (C_(off)~3V_(pi)~2L~2 /A~3) vs (1/A) for beams under stress dominating condition, where A is the area of a beam. The plots are extrapolated to intersect the y-axis. The value of the intercept can be used to extract the values of Young's modulus and residual stress, without any definite knowledge of the value of 'g'. In this paper, we have shown with the help of simulations that using our method the material properties can be extracted very accurately even when the gap (g) is very nonuniform.
机译：结构层的机械性能在MEMS结构的设计和优化中起着重要作用。插入式测量是一种流行的技术，用于测量材料的机械性能，但其成功取决于对梁与接地平面之间的间隙（g）及其均匀性的准确测量。在本文中，我们提出了一种不需要精确了解“ g”值的新颖技术。在我们提出的方法中，要同时制造大量具有不同长度（L）的光束，并且在同一组中测量除引入电压（V_（pi））之外的截止电容（C_（off））。 -向上。随后是（C_（off）〜3V_（pi）〜2L〜4 / A〜3）与（1 / A）在弯曲支配条件下的光束以及（C_（off）〜3V_（pi）〜在应力主导条件下，梁为2L〜2 / / A〜3）vs（1 / A），其中A为梁的面积。将图外推以与y轴相交。截距的值可用于提取杨氏模量和残余应力的值，而无需确切了解“ g”的值。在本文中，我们已通过仿真显示，即使间隙（g）非常不均匀，使用我们的方法也可以非常准确地提取材料属性。

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