• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; Proceedings of SPIE-The International Society for Optical Engineering; vol.6463 >Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches
【24h】

Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

机译：V的添加对MEMS接触开关Au薄膜力学性能的影响

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Au, Au-V solid solution, and Au-V_2O_5 dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for the Au-V_2O_5 films. Measurements of contact force and electrical contact resistance between pairs of Au or Au-V films show that increased hardness and resistivity in the alloy films results in higher contact resistance and less adhesion than in pure Au. These results imply that the AU-V_2O_5 films may exhibit attractive behavior when used in a contact configuration, but this has not yet been tested.
机译：制作了Au，Au-V固溶体和Au-V_2O_5分散膜，用于比较电学和机械特性。在所有薄膜中，电阻率和纳米压痕硬度均随V含量的增加而增加，但是对于Au-V_2O_5薄膜，电阻率增加与硬度增加的比率要低得多。成对的Au或Au-V膜之间的接触力和电接触电阻的测量结果表明，与纯Au相比，合金膜中硬度和电阻率的提高导致较高的接触电阻和较小的附着力。这些结果表明，AU-V_2O_5膜在接触配置中使用时可能表现出吸引人的性能，但这尚未经过测试。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号