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A Fast Model-order Reduction Algorithm for Microelectromechanical Devices

机译:微机电装置的快速模型降阶算法

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摘要

A fast model-order reduction algorithm is proposed for microelectromechanical devices. By breaking the system matrices obtained from FEM methods down into smaller ones, the proposed algorithm will reduce computational cost and memory requirements required by the inversion operation of the system matrix. As an example, experimental studies are presented for a linear-drive multiple-mode resonator demonstrating that predicted results are in very good agreement with results from previous publications.
机译:针对微机电设备,提出了一种快速的模型降阶算法。通过将从有限元方法获得的系统矩阵分解为较小的矩阵,该算法将减少系统矩阵求逆运算所需的计算成本和内存需求。例如,提出了针对线性驱动多模谐振器的实验研究,表明预测结果与先前出版物的结果非常吻合。

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