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首页> 外文会议>RIAO/OPTILAS 2004 >Replication of diffractive optical elements by injection molding
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Replication of diffractive optical elements by injection molding

机译：通过注塑复制衍射光学元件

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摘要

In this paper we describe the replication processes of DOE carried out at the Diffractive Optics Laboratory / UNICAMP for replicating DOE. In particular we present the results obtained in the replication by injection molding of microlens array, diffraction gratings and polarizing elements. The measurements of the geometric dimensions of the DOE masters, the nickel shims and the replicated structures were accomplished by perfilometry, AFM and SEM microscopy. The optical properties of both the DOE masters and their replicas were evaluated by measuring of the diffraction efficiency as a function of the incident wavelength, for orthogonal polarizations.
机译：在本文中，我们描述了在衍射光学实验室/ UNICAMP中为复制DOE而进行的DOE复制过程。特别是，我们介绍了通过微透镜阵列，衍射光栅和偏振元件的注塑成型复制获得的结果。 DOE母版，镍垫片和复制结构的几何尺寸的测量是通过渗滤，AFM和SEM显微镜进行的。对于正交偏振，通过测量衍射效率与入射波长的函数，来评估DOE母版及其复制品的光学特性。

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