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首页> 外文会议>RIAO/OPTILAS 2004 >Micro-structured surface-element for high-accuracy position measurement by vision and phase-measurement
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Micro-structured surface-element for high-accuracy position measurement by vision and phase-measurement

机译：通过视觉和相位测量实现高精度位置测量的微结构表面元件

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In interferometry sub-wavelength resolutions are achieved thanks to phase computations. The number of measurement points resolved per fringe depends on the signal to noise ratio and may vary from tens to billions. In this work, that principle of fringe interpolation by phase computation is applied to image processing for the construction of accurate position sensors based on vision. A micro-structured pattern is etched on a surface element and is used as a phase-reference signal similar to an interference fringe pattern. This surface element is fixed on the moving target of interest and is observed by a static vision system. Then target displacements are reconstructed and measured with a high accuracy by locating the phase-reference in the recorded images. In a first configuration in-plane position is retrieved with a resolution of about 10~(-2) pixel for horizontal and vertical coordinates and about 10~(-4) radian for the orientation. Thus nanometre displacements can be controlled by a diffractive optical system and micrometer-sized surface patterns. Furthermore, this method is self-calibrating since the phase-reference pattern dimensions are known accurately and then provide us with a size reference available in each recorded image. Different configurations allow the position measurement along the three-space directions while an interferometric set-up is able to locate the position versus the six degrees of freedom. Several measurements per second are performed with an up-to-date microcomputer thanks to the dedicated software developed.
机译：在干涉测量中，由于相位计算，可以实现亚波长分辨率。每个条纹分辨出的测量点数量取决于信噪比，并且可能从数十到数十亿不等。在这项工作中，将通过相位计算进行条纹插值的原理应用于图像处理，以构造基于视觉的精确位置传感器。将微结构化图案蚀刻在表面元件上，并用作类似于干涉条纹图案的相位参考信号。该表面元件固定在目标运动目标上，并由静态视觉系统观察。然后，通过在记录的图像中定位相位参考，可以高精度重建和测量目标位移。在第一配置中，以水平坐标和垂直坐标的分辨率为约10〜（-2）像素，以方位为大约10〜（-4）弧度来获取平面内位置。因此，可以通过衍射光学系统和微米尺寸的表面图案来控制纳米位移。此外，该方法是自校准的，因为可以准确地知道相位参考图案的尺寸，然后为我们提供每个记录图像中可用的尺寸参考。不同的配置允许沿着三个空间的方向进行位置测量，而干涉测量装置则可以相对于六个自由度来定位位置。得益于开发的专用软件，最新的微型计算机每秒可执行几次测量。

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