AN HDL MODEL FOR A VACUUM-SEALED MICROMACHINED PRESSURE SENSOR

机译：真空密封微机械压力传感器的HDL模型

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The development of behavioural models for micro-electromechanical systems (MEMS) is of great importance as it allows system-level simulation for MEMS components. This paper describes a behavioural model for a vacuum-sealed micro machined pressure sensor that can be integrated with electrical components within an electrical simulator using an analog hardware description language. Detailed description of the model as well as simulation results are presented.

机译：微机电系统（MEMS）行为模型的开发非常重要，因为它允许对MEMS组件进行系统级仿真。本文介绍了一种真空密封微机械压力传感器的行为模型，该模型可以使用模拟硬件描述语言与电气模拟器中的电气组件集成在一起。给出了模型的详细描述以及仿真结果。

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来源
《Second International Workshop on System-on-Chip for Real-Time Applications, Jul 6-7, 2002, Banff, Alberta》|2002年|p.429-439|共11页
会议地点 Banff(CA)
作者
Rafik S. Guindi;
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作者单位

Electronics Communication Engineering, Cairo University, Egypt;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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专利

1. Vacuum-sealed silicon micromachined pressure sensors [J] . Esashi M., Sugiyama S. Proceedings of the IEEE . 1998,第8期

机译：真空密封硅微机械压力传感器
2. Fabrication of a membrane type double cavity vacuum-sealed micro sensor for absolute pressure based on front-side lateral etching technology [J] . Rathore P.K., Akhtar J. Sensor Review . 2010,第1期

机译：基于正面横向刻蚀技术的膜片式双腔真空密封微传感器的制造
3. Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing [J] . Rongjun Cheng, Yulong Zhao, Cun Li, Micro & Nano Letters, IET . 2016,第6期

机译：具有压电激励和传感的微机械谐振压力传感器的建模与表征
4. An HDL model for a vacuum-sealed micromachined pressure sensor [C] . Rafik S. Guindi International workshop on SoC for real-time applications . 2003

机译：真空密封的微机械压力传感器的HDL模型
5. Micromachined optically interrogated pressure sensor and sensor array. [D] . Zhou, Jie. 2003

机译：微加工的光学询问压力传感器和传感器阵列。
6. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure [O] . Sen Ren, Weizheng Yuan, Dayong Qiao, 2013

机译：具有在大气压下工作的集成谐振器的微机械压力传感器
7. A Multi-Lead Vacuum-Sealed Capacitive Pressure Sensor [O] . A.V. Chavan, K.D. Wise 1998

机译：多引线真空密封电容式压力传感器
8. Planar surface-micromachined pressure sensor with a sub-surface, embedded reference pressure cavity [R] . Eaton, W. P., Smith, J. H. 1996

机译：平面表面微加工压力传感器，带有一个子表面，嵌入式参考压力腔

AN HDL MODEL FOR A VACUUM-SEALED MICROMACHINED PRESSURE SENSOR

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