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Ozone Measurement Technology in Pure Water Systems

机译：纯水系统中的臭氧测量技术

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摘要

Ozonation is an effective technique for sanitizing ultrapure water and treatment systems and was introduced in the Semiconductor industry over 25 years ago. With no permanent addition of material, unlike other chemical oxidants, its powerful oxidizing properties make ozonation an ideal treatment method. To assure adequate treatment levels as well as its removal downstream, measurements of dissolved ozone concentration are an essential part of the process.rnDescribed here is a unique combination of dissolved ozone measurement technology and instrumentation that boosts the performance, reliability and maintainability of equipment for this specialized measurement. The theory of sensor operation as well as its benefits and limitations under various conditions are covered. Associated multi-parameter instrumentation enables the combination of ozone with other important measurements such as resistivity, conductivity, TOC, pH, flowrate and dissolved oxygen
机译：臭氧化是一种用于净化超纯水和处理系统的有效技术，并且在25年前被引入半导体行业。与其他化学氧化剂不同，无需永久添加材料，其强大的氧化性能使臭氧氧化成为理想的处理方法。为了确保适当的处理水平并在下游将其去除，溶解臭氧浓度的测量是该过程的重要组成部分。此处描述的是溶解臭氧测量技术与仪器的独特结合，可提高设备的性能，可靠性和可维护性专业测量。涵盖了传感器工作原理及其在各种条件下的优点和局限性。关联的多参数仪器可将臭氧与其他重要测量值结合使用，例如电阻率，电导率，TOC，pH，流速和溶解氧

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