THE MEASUREMENT OF SUPERSMOOTH SURFACE ROUGHNESS WITH ANGSTROM DIMENSION

机译：用角尺寸测量超光滑表面的粗糙度

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This paper compared the most popular supersmooth roughness measurement instruments - Atom Force Microscope and Interferometric profiler. It was suggested that there was obviously different roughness magnitude when the same machined surface is measured though both have high longitudinal resolution. Interferometric profiler is preferred for measuring surface roughness while AFM is suitable for probing into more micro scale problems.

机译：本文比较了最流行的超光滑粗糙度测量仪器-原子力显微镜和干涉轮廓仪。建议在测量相同的机加工表面时，虽然纵向分辨率高，但粗糙度差异明显。干涉式轮廓仪是用于测量表面粗糙度的首选，而AFM适用于探究更多的微米级问题。

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来源
《Sixth International Conference on Progress of Machining Technology: With Some Topics in Advanced Manufacturing Technology (ICPMT'2002); Sep 10-14, 2002; Xi'an, China》|2002年|p.628-631|共4页
会议地点 Xian(CN);Xian(CN)
作者
GAO Chunfu; LIU Xiangyang; WANG Lijiang; LIU Weina;
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作者单位

Department of Mechanical Science and Engineering, Nanling Campus, Jilin University, Changchun China, 130025;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
关键词
supersmooth; roughness; measurement;

机译：超光滑;粗糙度;测量;

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THE MEASUREMENT OF SUPERSMOOTH SURFACE ROUGHNESS WITH ANGSTROM DIMENSION

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