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首页> 外文会议>Society of Tribologists and Lubrication Engineers annual meeting amp; exhibition 2009 >ADHESION AND FRICTION FORCES ON SILICON WAFERS WITH DUAL SURFACE MODIFICATIONS AT NANO-SCALE
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ADHESION AND FRICTION FORCES ON SILICON WAFERS WITH DUAL SURFACE MODIFICATIONS AT NANO-SCALE

机译：纳米尺度双表面修饰的硅晶片的附着力和摩擦力

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摘要

Surfaces of silicon wafers were topographically and chemically modified. As the first step, nano-channels were fabricated on silicon wafers using MEMS fabrication process. Next, the nano-channeled surfaces were coated with DLC thin film (20 nm thickness). Adhesion and friction forces on these surfaces were measured using an AFM. Results showed that the chemical and topographical modifications reduced the surface forces. Further, a combination of both the kinds of modifications was even more effective in decreasing the surface forces, owing to the combined effects of reduced real area of contact and lower interfacial energies. It is proposed that the combined surface modification is a potential route to enhance the tribological performance of elements of MEMS devices.
机译：对硅晶片的表面进行了拓扑和化学修饰。第一步，使用MEMS制造工艺在硅晶片上制造纳米通道。接下来，用DLC薄膜（20nm厚度）涂覆纳米通道表面。使用AFM测量在这些表面上的附着力和摩擦力。结果表明，化学和形貌的改变降低了表面力。此外，由于减小的实际接触面积和较低的界面能的综合作用，两种修饰的组合在减小表面力方面甚至更有效。提出组合表面改性是增强MEMS器件的元件的摩擦学性能的潜在途径。

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  • 来源
  • 会议地点 Lake Buena Vista FL(US)
  • 作者

    Kyounghwan Na; R. Arvind Singh; Duc-Cuong Phatn; Sungwook Yang; Eui-Sung Yoon;

  • 作者单位

    Nano-Bio Research Center, Korea Institute of Science and Technology 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791, South Korea;

    rnNano-Bio Research Center, Korea Institute of Science and Technology 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791, South Korea;

    rnNano-Bio Research Center, Korea Institute of Science and Technology 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791, South Korea;

    rnNano-Bio Research Center, Korea Institute of Science and Technology 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791, South Korea;

    rnNano-Bio Research Center, Korea Institute of Science and Technology 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791, South Korea;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械摩擦、磨损与润滑;
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