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首页> 外文会议>Society of Vacuum Coaters Annual Technical Conference; 20040424-29; Dallas,TX(US) >Electron Beam Web Coating-Not Only for Consumables?
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Electron Beam Web Coating-Not Only for Consumables?

机译：电子束网涂层-不仅用于耗材？

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摘要

A division of labor was establ ished in the past few decades for the vacuum web coating. Sputtering produces high quality functional layers and for high volume consumable products like metallized film for packaging, evaporation process is used. This separation does not exist in other markets. For example, in precision optics evaporation processes are used for production of rather complex multi-layer structures, with uniform requirements in the 1 % range. From the economical point of view, the use of evaporation processes also for optical function layers in web coating could be attractive. The coating speed with evaporation is one to two orders of magnitude higher compared to sputtering. Also, the material cost with evaporation is generally much lower. Different to sputter targets, no special machining is required for evaporation materials. Advantages of sputtering are the higher flexibility with regard to materials, potential for better adhesion and higher density of the layer, due to the presence of higher energetic particles and particularly the intrinsic stability of the uniformity. For evaporation a fast closed loop control system is needed. However, for each closed loop control system an inline measurement of the relevant layer property is essential.
机译：在过去的几十年中，真空幅材涂层已确定了分工。溅射产生高质量的功能层，并且对于大量消耗性产品（例如用于包装的金属化薄膜），使用蒸发工艺。其他市场不存在这种分离。例如，在精密光学中，蒸发工艺用于生产相当复杂的多层结构，其均匀要求在1％的范围内。从经济的角度来看，将蒸发工艺也用于幅材涂层中的光学功能层可能是有吸引力的。与溅射相比，蒸发的涂覆速度要高一到两个数量级。而且，蒸发带来的材料成本通常要低得多。与溅射靶不同，蒸发材料无需特殊加工。溅射的优点是，由于存在较高的高能粒子，尤其是均匀性的固有稳定性，因此在材料方面具有较高的柔韧性，具有更好的粘附力和较高的层密度的潜力。为了蒸发，需要一个快速的闭环控制系统。但是，对于每个闭环控制系统，必须对相关层的特性进行在线测量。

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