Image information modulation and processing for fringe scanning optical profiler

机译：条纹扫描光学轮廓仪的图像信息调制与处理

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Abstract: Fringe scanning technique is widely used to test the shape of optical element surfaces. In this paper, a method of image information modulation and processing for a fringe scanning optical profile used to measure surface roughness of precision machinery parts is presented. The reference mirror of a classical Linnik microinterferometer is driven by a piezoelectrical transducer (PZT) modulated using saw-wave, and the phase of interfering fringe is shifted linearly. The image data acquisition system, including a CCD array, PZT, DMAC6844, AD7820, has realized high synchronous data sampling frequency of 250 KB/sec and 10 bit A/D converting. The experimental results show that the converted Linnik microinterferometer can measure the roughness of precision surface where Ra is less than 0.01 m and obtain various standard parameters of roughness. Therefore, the function and precision of the instrument could be enhanced significantly. !6

机译：摘要：条纹扫描技术被广泛用于测试光学元件表面的形状。本文提出了一种用于测量精密机械零件表面粗糙度的条纹扫描光学轮廓的图像信息调制和处理方法。经典Linnik微干涉仪的参考镜由使用锯波调制的压电换能器（PZT）驱动，并且干涉条纹的相位线性移动。该图像数据采集系统包括CCD阵列，PZT，DMAC6844，AD7820，实现了250 KB /秒的高同步数据采样频率和10位A / D转换。实验结果表明，改造后的Linnik微干涉仪可以测量Ra小于0.01 m的精密表面的粗糙度，并获得各种粗糙度标准参数。因此，可以显着提高仪器的功能和精度。！6

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来源
《Soviet-Chinese Joint Seminar on Holography and Optical Information Processing》|1991年|p.263-266|共4页
会议地点 Bishkek(KG)
作者
Jiabi Chen; Nanjing Normal Univ.; Nanjing; Jiangsu; China; Zhengze Zhang; Huazhong Univ. of Science; Technology; Wuhan; Hubei; China; Li Zhu; Huazhong Univ. of Science; Technology; Wuhan; Hubei; China.;
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正文语种 eng
中图分类一般工业技术;
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Image information modulation and processing for fringe scanning optical profiler

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