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Multiwavelength non-incremental laser Doppler distance sensor with phase coding for vibration measurements

机译:具有相位编码的多波长非增量式激光多普勒距离传感器,用于振动测量

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摘要

In this article we present a novel optical sensor allowing simultaneous measurements of axial displacement and tangential velocity of moving rough solid state objects. The laser Doppler distance sensor with phase coding (P-LDDS) features multiple interference fringe systems which are superposed slightly tilted. The axial displacement of fast laterally moving rough solid state surfaces as well as of purely axial moving objects is determined via phase evaluation. Within a measurement range of 200 urn, the measured maximum systematic displacement error at a laterally moving rough solid state object is 1.4 urn and the displacement resolution is 240 nm. In contrast to conventional measurement techniques, such as triangulation, the displacement uncertainty is independent of the lateral object velocity. This unique feature can be utilized for precise displacement and vibration measurements of high speed objects.
机译:在本文中,我们提出了一种新颖的光学传感器,可以同时测量移动的粗糙固态物体的轴向位移和切向速度。带有相位编码(P-LDDS)的激光多普勒距离传感器具有多个干涉条纹系统,这些系统略微重叠。快速横向移动的粗糙固态表面以及纯轴向移动物体的轴向位移通过相位评估确定。在200微米的测量范围内,在横向移动的粗糙固态物体上测得的最大系统位移误差为1.4微米,位移分辨率为240纳米。与传统的测量技术(例如三角测量)相比,位移不确定性与横向物体速度无关。此独特功能可用于高速物体的精确位移和振动测量。

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