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首页> 外文会议>Symposium on Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, held April 5-9, 1999, San Francisco, California, U.S.A. >Investigation of textured back reflectors for microcrystalline silicon based solar cells
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Investigation of textured back reflectors for microcrystalline silicon based solar cells

机译：用于微晶硅基太阳能电池的带纹理的背反射器的研究

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摘要

Microcrystalline silicon ( mu c-Si:H) solar cells require an effective light trapping in the near infrared (NIR) to enhance the long wavelength spectral response. For this purpose we investigated back reflectors based on texture-etched ZnO/Ag stacks prepared on glass substrates by magnetron sputtering. With decreasing sputter pressure the resulting surface texture of the glass/Aga/ZnO substrates after etching exhibits a larger feature size and root mean square roughness. The increase in feature size corresponds to an increase of diffuse reflectivity. Applied in microcrystalline solar cells prepared by VHF plasma enhanced chemical vapour deposition (PECVD). the reflectors showing the largest feature size (prepared at the lowest possible sputter pressure) yielded the highest long wavelength spectral response. The mu c-Si n-i-p cells prepared on the latter back reflector exhibited efficiencies of 6.9
机译：微晶硅（mu c-Si：H）太阳能电池需要有效捕获近红外（NIR）中的光，以增强长波长光谱响应。为此，我们研究了基于磁控溅射在玻璃基板上制备的经过纹理蚀刻的ZnO / Ag叠层的背面反射器。随着溅射压力的降低，蚀刻后玻璃/ Aga / ZnO基板的最终表面纹理呈现出较大的特征尺寸和均方根粗糙度。特征尺寸的增加对应于漫反射率的增加。应用于通过VHF等离子体增强化学气相沉积（PECVD）制备的微晶太阳能电池中。显示最大特征尺寸（在最低的溅射压力下制备）的反射器产生了最高的长波长光谱响应。在后者的后反射器上制备的mu c-Si n-i-p电池的效率为6.9

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