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首页> 外文会议>Symposium on Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials, held December 1-2, 1997, Boston, Massachusetts, U.S.A. >Formation of nanocluster colloids of TiN, gold and copper in magnesium oxide by MeV ion implantation
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Formation of nanocluster colloids of TiN, gold and copper in magnesium oxide by MeV ion implantation

机译：MeV离子注入法在氧化镁中形成TiN，金和铜的纳米团簇胶体

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摘要

We have implanted ions of Sn, Au and Cu at energies beteen 160 keV and 2.0 MeV into single crystals of MgO (100) at room temperature. The formation of nanoclusters was confirmed using photospectrometry, in combination with Mie's theory, which was indirect but nondestructive. Using Doyle's theory, as well as Rutherford Backscattering Spectrometry (RBS), we correlated the full width half maximum of the absorption bands to the estimated size of the metallic nanoclusters between 1-10 nm. These clusters were formed both by over implantation and by a combination of threshold fluence of the implanted species and post thermal annealing. The changes in the estimated size of the nanoclusters, after annealing at temperatures ranging from 500 deg C to 1000 deg C, were observed using photospectrometry.
机译：我们在室温下以160 keV和2.0 MeV的能量注入了Sn，Au和Cu离子到MgO（100）的单晶中。纳米团簇的形成是通过光度法结合米氏理论证实的，该理论是间接的但无损的。使用Doyle的理论以及卢瑟福背散射光谱（RBS），我们将吸收谱带的半峰全宽与1-10 nm之间的金属纳米团簇的估计尺寸相关联。这些簇是通过过度注入以及通过注入物种的阈值通量和后热退火的组合而形成的。在500℃至1000℃的温度范围内退火后，使用分光光度法观察到纳米团簇的估计尺寸的变化。

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