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Modified preston equation- revisited

机译:修改后的普雷斯顿方程

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The effect of pressure and velocity on the polish rates of copper was determined in DI water and in the presence of ferric nitrate, H_2O_2/glycine, and NH_4OH with alumina particles as the abrasives. The polish rate shows a stronger dependence on velocity than that predicted by the Preston equation in the case of ferric nitrate, a highly reactive chemical. The velocity dependence is weaker for the other two less reactive chemicals, and is the same as that predicted by Preston equation for DI water. Our earlier empirical model. R= KPV+BV + Rc, where K, B, and R_c are constants, describes all the polish rate data satisfactorily.
机译:在去离子水中,硝酸铁,H_2O_2 /甘氨酸和NH_4OH(以氧化铝颗粒作为磨料)的存在下,确定压力和速度对铜抛光速率的影响。在硝酸铁(一种高反应性化学物质)的情况下,抛光速率对速度的依赖性比Preston方程所预测的要强。对于其他两种反应性较小的化学药品,其速度相关性较弱,并且与Preston方程对去离子水的预测相同。我们较早的经验模型。 R = KPV + BV + Rc,其中K,B和R_c为常数,可以令人满意地描述所有抛光速率数据。

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