首页> 外文会议>Symposium on Epitaxial Oxide Thin Films III March 31-April 2, 1997, San Francisco, California,U.S.A >Correlations between YBa_2Cu_3O_7- delta thin film materials properties and Rf device performance
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Correlations between YBa_2Cu_3O_7- delta thin film materials properties and Rf device performance

机译:YBa_2Cu_3O_7-δ薄膜材料性能与Rf器件性能之间的相关性

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摘要

Better knowledge of the relationships between YBa_2Cu_3O_7- delta (YBCO) materials properties and the RF performance of devices made from these materials should lead to improved device performance and yields.A variety of materials tests were performed on our production YBCO films which were patterned into standard microstrip resonators. The materials parameters were then compared with the unloaded Q of the resonators at 77 K. As expected, films with higher Q's tended to have higher T_c, higher J_c, greater film thickness, and better crystallinity. The last was based on narrower YBCO rocking curve peak, lower second phase density (judged by lower resistivity and greater theta -2 theta (500) peak area), and a narrower theta -2 theta (005) peak. The room temperature sheet resistance was found to be a useful predictor of microwave performance for films that are otherwise similar.
机译:更好地了解YBa_2Cu_3O_7-δ(YBCO)材料特性与使用这些材料制成的器件的RF性能之间的关系应该可以改善器件的性能和良率。对我们生产的YBCO薄膜进行了各种材料测试,这些薄膜已图案化为标准微带谐振器。然后将材料参数与谐振器在77 K下的空载Q值进行比较。正如预期的那样,具有较高Q值的薄膜往往具有较高的T_c,较高的J_c,较大的膜厚度和较好的结晶度。最后一个基于更窄的YBCO摇摆曲线峰,较低的第二相密度(由较低的电阻率和较大的theta -2 theta(500)峰面积判断)和更窄的theta -2 theta(005)峰。发现室温薄层电阻对于其他方面相似的膜是微波性能的有用预测指标。

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