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首页> 外文会议>Symposium on Epitaxial Oxide Thin Films III March 31-April 2, 1997, San Francisco, California,U.S.A >Transmission electron microscopy study of YBa_2Cu_3O_7-x thin film multilayer devices
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Transmission electron microscopy study of YBa_2Cu_3O_7-x thin film multilayer devices

机译：YBa_2Cu_3O_7-x薄膜多层器件的透射电镜研究

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摘要

Patterned thin film multilayer structures, consisting of superconducting YBa_2Cu_3O_7-x (YBCO) and insulating PrBBa_2Cu_3O_7-x (PrBCO), deposited onto (001) MgO substrates by electron beam co-evaporation, have been examined using Transmission Electron Microscopy (TEM).It is shown that PrBCO is c-oriented everywhere and shows pronounced faceting on the steps. Strain contrast features are present where the PrBCO has to adapt to large variations in the slope angle of the underlying YBCO layer. However, tilt-grain boundaries in YBCO or PrBCO layers are nucleated when depositing over small MgO steps formed by unintentional milling into the substrate. It is shown that grain boundaries associated with milled steps on MgO can be eliminated by the use of a PrBCO buffer layer beneath the superconducting base layer.
机译：已使用透射电子显微镜（TEM）对由超导YBa_2Cu_3O_7-x（YBCO）和绝缘PrBBa_2Cu_3O_7-x（PrBCO）组成的图案化薄膜多层结构进行了沉积，该结构通过电子束共蒸发沉积在（001）MgO衬底上。结果表明PrBCO在任何地方都是面向c的，并且在台阶上显示出明显的刻面。存在应变对比特征，其中PrBCO必须适应下层YBCO层的倾斜角度的大变化。但是，在通过无意铣削到基板中形成的小MgO台阶上进行沉积时，YBCO或PrBCO层中的倾斜晶粒边界会形核。结果表明，通过在超导基层下面使用PrBCO缓冲层，可以消除与MgO上研磨步骤相关的晶界。

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