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首页> 外文会议>Symposium on Materials and Devices for Optoelectronics and Microphotonics, Apr 1-5, 2002, San Francisco, California >Performance and Reliability of a MEMS-based tunable optical filter operating in the 1565 nm-1525 nm wavelength range
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Performance and Reliability of a MEMS-based tunable optical filter operating in the 1565 nm-1525 nm wavelength range

机译：在1565 nm-1525 nm波长范围内运行的基于MEMS的可调光学滤波器的性能和可靠性

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摘要

This paper describes the results of extensive performance and reliability characterization of a silicon-based surface micro-machined tunable optical filter. The device comprises a high-finesse Fabry-Perot etalon with one flat and one curved dielectric mirror. The curved mirror is mounted on an electrostatically actuated silicon nitride membrane tethered to the substrate using silicon nitride posts. A voltage applied to the membrane allows the device to be tuned by adjusting the length of the cavity. The device is coupled optically to an input and an output single mode fiber inside a hermetic package. Extensive performance characterization (over operating temperature range) was performed on the packaged device. Parameters characterized included tuning characteristics, insertion loss, filter line-width and side mode suppression ratio. Reliability testing was performed by subjecting the MEMS structure to a very large number of actuations at an elevated temperature both inside the package and on a test board. The MEMS structure was found to be extremely robust, running trillions of actuations without failures. Package level reliability testing conforming to Telcordia standards indicated that key device parameters including insertion loss, filter line-width and tuning characteristics did not change measurably over the duration of the test.
机译：本文介绍了基于硅的表面微加工可调谐滤光片的广泛性能和可靠性表征的结果。该设备包括一个带有一个平面和一个弯曲介电镜的高级Fabry-Perot标准具。弯曲的反射镜安装在静电驱动的氮化硅膜上，该膜使用氮化硅柱拴在基板上。施加在膜片上的电压允许通过调节腔体的长度来调整设备。该设备在密闭封装内部光学耦合到输入和输出单模光纤。在封装的器件上进行了广泛的性能表征（在工作温度范围内）。表征的参数包括调谐特性，插入损耗，滤波器线宽和侧模抑制比。可靠性测试是通过在封装内部和测试板上在升高的温度下使MEMS结构经受大量促动来执行的。发现MEMS结构极其坚固，可进行数万亿次致动而不会发生故障。符合Telcordia标准的封装级可靠性测试表明，包括插入损耗，滤波器线宽和调谐特性在内的关键设备参数在测试过程中并未发生可测量的变化。

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