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首页> 外文会议>Symposium on microelectronics technology and devices >Porous silicon photonic crystals: Influence of electrolyte composition on the nanostructure and the optical response
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Porous silicon photonic crystals: Influence of electrolyte composition on the nanostructure and the optical response

机译：多孔硅光子晶体：电解质成分对纳米结构和光学响应的​​影响

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Porous silicon photonic crystal devices with and without microcavity were fabricated anodizing p~+-silicon into electrolyte with different chemical composition. They were made in order to study the effect of the electrolyte composition upon their structural properties and on their optical response. It was found that low HF-electrolytes yield structures with high porosity, weak mechanical stability and low effective refractive index. However, the addition of water into this electrolyte leads to the formation of layers with high refractive index and strong mechanical stability. In addition, the interface roughnesses of them are also dependent on the electrolyte features and influence the reflectance quality of these devices. This quality can be improvement after thermal oxidation or may worsen, depending on the features of the porous structure and on the effect of the oxidation upon the interface roughness. Long oxidation times yield smoother interfaces.
机译：制备了具有和不具有微腔的多孔硅光子晶体器件，将p〜+硅阳极氧化成化学成分不同的电解质。制备它们是为了研究电解质组合物对其结构性能和其光学响应的​​影响。发现低HF电解质产生具有高孔隙率，弱机械稳定性和低有效折射率的结构。然而，将水添加到该电解质中导致形成具有高折射率和强机械稳定性的层。另外，它们的界面粗糙度还取决于电解质的特征并影响这些器件的反射质量。取决于多孔结构的特征以及氧化对界面粗糙度的影响，该质量可以在热氧化后得到改善或降低。长时间的氧化会产生更光滑的界面。

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