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Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Hydrogen Cyanide Gas

机译:嵌入式压阻微悬臂梁传感器:用于感测氰化氢气体的材料

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We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a "sensing material" designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.
机译:我们已经使用嵌入式压阻微悬臂梁(EPM)传感器检测氰化氢气体。 EPM传感器是小型的,基于MEMS的设备,由微小的压阻微悬臂梁组成,该微悬臂梁部分嵌入“传感材料”中,该材料设计为在暴露于所需分析物时具有体积响应性。这些EPM传感器可能很小,可以在简单且便宜的支持电子设备上运行,高度抗移动或冲击,可以通过硬线连接或大量无线方式运行,并且能够检测许多不同的分析物。在这项研究中,我们使用了EPM传感器来检测氰化氢气体。初步结果表明,EPM传感器对可能致命的HCN水平提供了快速响应(不到5秒)。

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