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首页> 外文会议>Symposium on Recent Advances in Catalytic Materials December 2-4, 1997, Boston, Massachusetts, U.S.A. >Catalytic Decomposition of Perfluorcompounds
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Catalytic Decomposition of Perfluorcompounds

机译：全氟化合物的催化分解

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摘要

It is becoming increasingly important to decompose PFCs (Perfluorocompounds), which are powerful greenhouse gases. The process of catalytic decomposition is expected to be effective in operating at lower temperatures if catalysts of high activity and durability are developed. The decomposition activities of PFC with H_2O was investigated using several catalysts. It was found that PFC decomposition activity was related to the reactivity of fluorine and the formation of mixed oxides. Using the catalyst we have developed, CF_4 was decomposed with conversion above 99.9percent over 1988h. Furthermore, another PFC was decomposed over the catalyst. The order of the conversion was CHF_3 > CF_4 > C_2F_6. THe catalytic decomposition system can use the treatment of PFCs in dry etch process waste gas.
机译：分解作为强大温室气体的PFC（全氟化合物）变得越来越重要。如果开发出高活性和耐久性的催化剂，则催化分解的方法有望在较低的温度下有效。使用几种催化剂研究了PFC在H_2O中的分解活性。发现PFC的分解活性与氟的反应性和混合氧化物的形成有关。使用我们开发的催化剂，CF_4在1988h内的转化率超过99.9％。此外，另一种PFC在催化剂上分解。转换顺序为CHF_3> CF_4> C_2F_6。催化分解系统可以使用干法蚀刻工艺废气中的PFC进行处理。

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