Spectroscopic determination of C_2 densities in Ar/H_2/CH_4 and Ar/H_2/C_(60) microwave plasmas for nanocrystalline diamond synthesis

机译：光谱法测定纳米晶金刚石合成中Ar / H_2 / CH_4和Ar / H_2 / C_（60）微波等离子体中C_2的密度

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We have measured the steady state concentration of gas phase C_2 in Ar/H_2/CH_4 and Ar/H_2/C_(60) microwave plasms used for the deposition of nanocrystalline diamond films. High sensitivity white light absorption spectroscopy is used to monitor the C_2 density using the d~ PI <- a~3 PI (0,0) vibrational band of C_2 as chamber pressure, microwave power, substrate temperature and feed gas mixtures are varied in both chemistries. Understanding how these parameters influence the C_2 density in the plasma volume provides insight into discharge mechanisms relevant to the deposition of nanocrystalline diamond.

机译：我们已经测量了用于沉积纳米晶金刚石膜的Ar / H_2 / CH_4和Ar / H_2 / C_（60）微波等离子体中气相C_2的稳态浓度。使用高灵敏度白光吸收光谱法，利用C_2的d〜PI <-a〜3 PI（0,0）振动带，随着腔室压力，微波功率，基质温度和进料气体混合物的变化，来监测C_2密度化学。了解这些参数如何影响等离子体体积中的C_2密度，可以提供与纳米晶金刚石沉积相关的放电机理的见解。

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《Symposium on In Situ Process Diagnostics and Intelligent Materials Processing held December 2-5, 1997, Boston, Massachusetts, U.S.A.》|1997年|p.275-280|共6页
会议地点 Boston MA(US)
作者
A.N. Goyette; J.E. Lawler; L.W. Anderson; D.M. Gruen; T.G. McCauley; D. Zhou; A.R. Krauss;
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机译：微波激活的CH_4 / H_2 / Ar等离子体用于微晶，纳米晶和超纳米晶金刚石沉积的组合实验和模型研究
2. Structural and chemical characterisation of soot particles formed in Ar/H_2/CH_4 microwave discharges during nanocrystalline diamond film synthesis [J] . N. Aggadi, C. Arnas, F. Benedic Diamond and Related Materials . 2006,第4a8期

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3. Effect of CH_4 concentration on the growth behavior, structure, and transparent properties of ultrananocrystalline diamond films synthesized by focused microwave Ar/CH_4/H_2 plasma jets [J] . Wen-Hsiang Liao, Chii-Ruey Lin, Da-Hua Wei Applied Surface Science . 2013,第apra1期

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4. Spectroscopic determination of C_2 densities in Ar/H_2/CH_4 and Ar/H_2/C_(60) microwave plasmas for nanocrystalline diamond synthesis [C] . A.N. Goyette, J.E. Lawler, L.W. Anderson, Symposium on in situ process diagnostics and intelligent materials processing . 1998

机译：用于纳米晶金刚石合成的Ar / H_2 / CH_4和Ar / H_2 / C_（60）微波等离子体中的C_2密度的光谱测定
5. Synthesis of diamond in high-power density microwave plasmas [D] . Chein, Tsan-Heui 1997

机译：高功率密度微波等离子体中金刚石的合成
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7. Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH_4/H_2/N_2 plasma enhanced chemical vapor deposition [O] . Ficek Mateusz, Sankaran Kamatchi J., Ryl Jacek, 2016

机译：微波测量CH_4 / H_2 / N_2等离子体增强化学气相沉积过程中氮掺杂金刚石薄膜的椭偏研究
8. Spectroscopic determination of C2 in Ar/H2/CH4 and Ar/H2/C60 microwave plasmas211 for nanocrystalline diamond synthesis [R] . Goyette, A. N., Lawler, J. E., Anderson, L. W., 1998

机译：光谱法测定ar / H2 / CH4和ar / H2 / C60微波等离子体中的C2用于纳米金刚石合成

Spectroscopic determination of C_2 densities in Ar/H_2/CH_4 and Ar/H_2/C_(60) microwave plasmas for nanocrystalline diamond synthesis

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