In situ monitoring of anodic oxide growth on Si (001) by interface second-harmonic generation

机译：通过界面二次谐波生成原位监测Si（001）上的阳极氧化物生长

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Optical second-harmonic (SH) generation is used to monitor the anodic growth of oxide on a (001) Si surface. The measured SH intensity is dominated by the nonlinear optical response of the space charge region in the Si just below the Si/oxide interface. The interface SH technique can detect the onset of H desorption, identify the flat band potential, and probe the evolution of space charge within the growing oxide layer.

机译：光学二次谐波（SH）生成用于监视（001）Si表面上氧化物的阳极生长。测得的SH强度主要由Si /氧化物界面正下方的Si中的空间电荷区域的非线性光学响应决定。 SH界面技术可以检测H解吸的发生，识别平带电势并探测生长的氧化物层中空间电荷的演变。

著录项

来源
《Symposium on In Situ Process Diagnostics and Intelligent Materials Processing held December 2-5, 1997, Boston, Massachusetts, U.S.A.》|1997年|p.59-64|共6页
会议地点 Boston MA(US)
作者
S. Janz; J.A. Bardwell;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词

相似文献

外文文献
中文文献
专利

1. Analysis of second-harmonic generation by unamplified, high-repetition-rate, ultrashort laser pulses at Si(001) interfaces [J] . Dadap J.I., Hu X.F. IEEE journal of selected topics in quantum electronics . 1995,第4期

机译：通过Si（001）界面上未经放大的高重复频率超短激光脉冲分析二次谐波
2. dc-electric-field-induced and low-frequency electromodulation second-harmonic generation spectroscopy of Si(001)-SiO2 interfaces [J] . Aktsipetrov OA., Melnikov AV., Mishina ED., Physical Review, B. Condensed Matter . 1999,第12期

机译：Si（001）-SiO2界面的直流电场感应和低频电调制二次谐波产生光谱
3. dc-electric-field-induced and low-frequency electromodulation second-harmonic generation spectroscopy of Si(001)-SiO2 interfaces [J] . Aktsipetrov OA., Melnikov AV., Mishina ED., Physical Review, B. Condensed Matter . 1999,第12期

机译：Si（001）-SiO2界面的直流电场感应和低频电调制二次谐波产生光谱
4. In situ monitoring of anodic oxide growth on Si (001) by interface second-harmonic generation [C] . S. Janz, J.A. Bardwell, Materials Research Society Symposium on in situ process diagnostics and intelligent materials processing . 1998

机译：用界面二次谐波产生原位监测Si（001）对Si（001）的阳极氧化物生长
5. Optical second-harmonic electro- and thermoreflectance spectroscopy of silicon(001)/silicon dioxide, hydrogen-silicon(001), and silicon(001)-(2 x 1) interfaces by femtosecond pulses. [D] . Dadap, Jerry Icban, Jr. 1995

机译：硅（001）/二氧化硅，氢-硅（001）和硅（001）-（2 x 1）界面的飞秒脉冲光学二次谐波电反射和热反射光谱。
6. Off-Stoichiometric Reactions at the Cell–Substrate Biomolecular Interface of Biomaterials: In Situ and Ex Situ Monitoring of Cell Proliferation Differentiation and Bone Tissue Formation [O] . Giuseppe Pezzotti, Tetsuya Adachi, Francesco Boschetto, 2019

机译：生物材料的细胞-底物生物分子界面的化学计量外反应：原位和异位监测细胞的增殖分化和骨组织形成
7. DC-electric-field-induced and low-frequency electromodulation second-harmonic generation spectroscopy of Si(001)-SiO$_2$ interfaces [O] . Aktsipetrov, O. A., Fedyanin, A. A., Melnikov, A. V., 1998

机译：直流电场感应和低频电调制 si（001）-siO $ _2 $界面的二次谐波产生光谱
8. Epitaxial Growth and Interface Parameters of Si Layers on GaAs(001) and AlAs(001)Substrates [R] . Bratina, G., Sorba, L., Antonini, A., 1991

机译：Gaas（001）和alas（001）衬底上si层的外延生长和界面参数

In situ monitoring of anodic oxide growth on Si (001) by interface second-harmonic generation

摘要

著录项

相似文献

相关主题

期刊订阅