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首页> 外文会议>Symposium on Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures Dec 2-6, 2002 Boston, Massachusetts, U.S.A. >Application Fields of SEM/SPM Hybridsystems: Nanoscopic EBIC and Near Field CL
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Application Fields of SEM/SPM Hybridsystems: Nanoscopic EBIC and Near Field CL

机译：SEM / SPM混合系统的应用领域：纳米EBIC和近场CL

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摘要

SPM/SEM-hybridsystems are more than only a combination of complementary microscopy techniques, because the used probes can simultaneously either be used as sensors, which give access to a vast variety of material properties, or as actuators, which can deliberately modify samples properties. The wide application field as well as flexibility is demonstrated exemplarily on techniques in microanalyses like nano-probing, cathodoluminescence, electron beam induced currents, and thermal analyses. These results provide an interesting perspective with respect to failure analyses and reliability of modern materials and devices.
机译：SPM / SEM混合系统不仅仅是互补显微镜技术的组合，因为使用过的探针可以同时用作可访问多种材料特性的传感器，也可以用作可以故意修改样品特性的执行器。在诸如纳米探测，阴极发光，电子束感应电流和热分析之类的微分析技术中示例性地展示了广泛的应用领域和灵活性。这些结果为故障分析以及现代材料和设备的可靠性提供了有趣的视角。

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