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Nanoscale 3D Chemical Mapping by Spectroscopic Electron Tomography

机译:光谱电子层析成像技术的纳米级3D化学作图

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摘要

Electron Tomography is shown to be applicable to problems of materials science if a contrast mechanism is used which provides a projection relationship for crystals not depending on lattice plane orientation. Energy filtered TEM (EFTEM) in its mode of electron spectroscopic imaging (ESI) and STEM-EDX-Mapping are, subject to limitations, suitable image formation techniques. The spectroscopic operation not only allows to overcome Bragg scattering artefacts, but offers the possibility of recording 4-dimensional data (volume and energy) of a region of interest, otherwise only known from NMR and XAS/XANES tomography at larger length-scales and from field-ion microscopy (atom probe) under restrictive conditions.
机译:如果使用一种对比机制为电子提供不依赖晶格面取向的投影关系的对比机制,则表明电子断层扫描适用于材料科学问题。在电子光谱成像(ESI)和STEM-EDX-Mapping模式下进行能量过滤的TEM(EFTEM)受制于适当的成像技术。光谱操作不仅可以克服布拉格散射伪影,而且还可以记录感兴趣区域的4维数据(体积和能量),否则只能从NMR和XAS / XANES层析成像中以更大的长度范围了解,也可以从限制性条件下的现场离子显微镜(原子探针)。

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