Determination of the Plastic Behavior of Low Thermal Expansion Glass at the Nanometer Scale

机译：纳米尺度低热膨胀玻璃塑性行为的确定

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

The nanometer-scale plastic behavior of two low thermal expansion glasses (ULE~(~R) and Zerodur~(~R)) was determined through a combination of nanoindentation experiments and finite element modeling. The finite element models were then extended to investigate aspects of the performance of these materials as extreme ultraviolet lithography reticles.

机译：通过纳米压痕实验和有限元建模相结合，确定了两种低热膨胀玻璃（ULE〜（〜R）和Zerodur〜（〜R））的纳米级塑性行为。然后扩展了有限元模型，以研究这些材料作为极端紫外光刻掩模版的性能方面。

著录项

来源
《Symposium on Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures Dec 2-6, 2002 Boston, Massachusetts, U.S.A.》|2002年|p.413-418|共6页
会议地点 Boston MA(US);Boston MA(US)
作者
Richard Tejeda; Roxann Engelstad; Edward Lovell; Anthony Anderson; Dehua Yang; Kenneth Blaedel;
展开▼
作者单位

University of Wisconsin Computational Mechanics Center, Madison, WI 53706;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词

相似文献

外文文献
中文文献
专利

1. Suppression of the shear band instability during plastic flow of nanometer-scale confined metallic glasses [J] . A. Donohue, F. Spaepen, R. G. Hoagland, Applied Physics Letters . 2007,第24期

机译：抑制纳米级受限金属玻璃塑性流动过程中的剪切带不稳定性
2. Thermal expansion behavior of co-extruded wood-plastic composites with glass-fiber reinforced shells [J] . Runzhou Huang, Wen Xiong, Xinwu Xu, Bioresources . 2012,第4期

机译：玻璃纤维增强壳共挤木塑复合材料的热膨胀行为
3. Scan-induced patterning in glassy polymer films: Using scanning force microscopy to study plastic deformation at the nanometer length scale [J] . Schmidt RH., Haugstad G., Gladfelter WL. Langmuir: The ACS Journal of Surfaces and Colloids . 2003,第3期

机译：扫描诱导的玻璃状聚合物膜中的图案：使用扫描力显微镜研究纳米长度尺度上的塑性变形
4. Determination of the Plastic Behavior of Low Thermal Expansion Glass at the Nanometer Scale [C] . Richard Tejeda, Roxann Engelstad, Edward Lovell, Materials Research Society Symposium . 2003

机译：测定纳米尺度低热膨胀玻璃的塑性行为
5. Plasma spraying low thermal expansion alumino-silicate glasses. [D] . Weaver, Douglas Trent. 2001

机译：等离子喷涂低热膨胀铝硅酸盐玻璃。
6. Lower nanometer-scale size limit for the deformation of a metallic glass by shear transformations revealed by quantitative AFM indentation [O] . Arnaud Caron, Roland Bennewitz 2015

机译：定量AFM压痕揭示的剪切转变导致金属玻璃变形的纳米级尺寸下限
7. Quantitative nanometer-scale thermal metrology using scanning joule expansion microscopy [O] . Grosse Kyle L. 2011

机译：使用扫描焦耳扩展显微镜的定量纳米级热计量
8. Determination of the Optimum Crystallization Conditions of a High Thermal Expansion Glass-Ceramic [R] . Henderson, W. R., Kramer, D. P., Sullenger, D. B. 1984

机译：高热膨胀微晶玻璃最佳结晶条件的确定

Determination of the Plastic Behavior of Low Thermal Expansion Glass at the Nanometer Scale

摘要

著录项

相似文献

相关主题

期刊订阅