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Developing Terahertz Imaging Equation and Enhancement of the Resolution of Terahertz Images using Deconvolution

机译:开发太赫兹成像方程并使用反卷积增强太赫兹图像的分辨率

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This paper introduces a novel reconstruction approach for enhancing the resolution of the terahertz (THz) images. For this purpose the THz imaging equation is derived. According to our best knowledge we are reporting the first THz imaging equation by this paper. This imaging equation is universal for THz far-field imaging systems and can be used for analyzing, describing and modeling of these systems. The geometry and behavior of Gaussian beams in far-field region imply that the FWHM of the THz beams diverge as the frequencies of the beams decrease. Thus, the resolution of the measurement decreases in lower frequencies. On the other hand, the depth of penetration of THz beams decreases as frequency increases. Roughly speaking beams in sub 1.5 THz, are transmitted into integrated circuit (IC) packages and the similar packaged objects. Thus, it is not possible to use the THz pulse with higher frequencies in order to achieve higher resolution inspection of packaged items. In this paper, after developing the 3-D THz point spread function (PSF) of the scanning THz beam and then the THz imaging equation, THz images are enhanced through deconvolution of the THz PSF and THz images. As a result, the resolution has been improved several times beyond the physical limitations of the THz measurement setup in the far-field region and sub-Nyquist images have been achieved. Particularly, MSE and SSIM' have been increased by 27% and 50% respectively. Details as small as 0.2 mm were made visible in the THz images which originally reveals no details smaller than 2.2 mm. In other words the resolution of the images has been increased by 10 times. The accuracy of the reconstructed images was proved by high resolution X-ray images.
机译:本文介绍了一种新颖的重建方法,用于增强太赫兹(THz)图像的分辨率。为此,推导了太赫兹成像方程。据我们所知,我们正在报告第一个太赫兹成像方程。该成像方程对太赫兹远场成像系统通用,可用于分析,描述和建模这些系统。高斯光束在远场区域的几何形状和行为表明,太赫兹光束的半高宽随着光束频率的降低而发散。因此,测量的分辨率在较低的频率下降低。另一方面,太赫兹光束的穿透深度随着频率的增加而减小。粗略地说,低于1.5 THz的光束被传输到集成电路(IC)封装和类似的封装物体中。因此,不可能使用具有更高频率的太赫兹脉冲来实现对包装物品的更高分辨率检查。在本文中,先开发了扫描太赫兹光束的3-D太赫兹点扩展函数(PSF),然后开发了太赫兹成像方程,然后通过对太赫兹PSF和太赫兹图像进行反卷积来增强太赫兹图像。结果,分辨率已经超出了远场区域中THz测量设置的物理限制,提高了数倍,并且获得了亚奈奎斯特图像。特别是,MSE和SSIM'分别增加了27%和50%。在太赫兹图像中可以看到小至0.2毫米的细节,而最初显示的细节不小于2.2毫米。换句话说,图像的分辨率提高了10倍。高分辨率X射线图像证明了重建图像的准确性。

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