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首页> 外文会议>Terahertz, RF, millimeter, and submillimeter-wave technology and applications VI >Fabrication and characterization of suspended graphene membranes for miniature Golay cells
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Fabrication and characterization of suspended graphene membranes for miniature Golay cells

机译：微型Golay细胞悬浮石墨烯膜的制备与表征

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摘要

The development of miniaturized Golay cell arrays would enable the combination of the high sensitivity of a Golay cell with the imaging capability of focal plane arrays. The critical component of a miniaturized Golay cell is the deflecting membrane, which must simultaneously have a high breaking strength and a low flexural rigidity. Graphene suits this purpose ideally on account of its high strength and atomic thickness, in contrast with thicker polymeric membranes. Low flexural rigidity is critical to deflection sensitivity in response to temperature changes of the gas enclosed within a Golay cell scaled to the 10 //m to 100 ftm scale. We report here a simple method for fabrication of suspended graphene membranes suitable for Golay cells. The technique is based on chemical vapour deposition of graphene on copper, followed by a sacrificial etch of the copper substrate. By this organic-free technique, graphene can be suspended over 10 - 20 /zm apertures in copper thin films free of surface contamination and with high structural integrity. The cavities are sealed on the back-side with an indium film to produce proof-of-principle miniature cells with a flexible, suspended graphene membrane. Atomic force microscopy enables the force versus deflection curve of a graphene-enclosed cell to be characterized. We further report the temperature dependent equilibrium deflection (up to 60°C) of a graphene-enclosed cell by atomic force microscopy measurements taken with heat directly applied to the cell substrate.
机译：微型Golay细胞阵列的发展将使Golay细胞的高灵敏度与焦平面阵列的成像能力相结合。小型Golay电池的关键组件是偏转膜，该偏转膜必须同时具有较高的断裂强度和较低的抗弯刚度。与较厚的聚合物膜相比，石墨烯具有高强度和原子厚度，因此非常适合此目的。低的挠曲刚度对于响应封装在Golay电池中的气体的温度变化（对于缩放比例为10 // m到100 ftm规模）而言，对于挠曲灵敏度至关重要。我们在这里报告了一种适用于Golay细胞的悬浮石墨烯膜的简单制造方法。该技术基于石墨烯在铜上的化学气相沉积，然后对铜基板进行牺牲性蚀刻。通过这种无有机物技术，石墨烯可以悬浮在铜薄膜中的10-20 / zm孔中，而不受表面污染并且具有很高的结构完整性。用铟膜在背面密封型腔，以产生带有柔性，悬浮石墨烯膜的原理证明微型电池。原子力显微镜可以表征石墨烯封闭的电池的力与挠度曲线。我们进一步通过原子力显微镜测量报告了石墨烯封闭电池的温度依赖性平衡变形（最高60°C），该测量是通过直接施加到电池基板的热量进行的。

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  • 会议地点 San Francisco CA(US)
  • 作者

    Elizabeth Ledwosinska; Abdeladim Guermoune; Mohamed Siaj; Thomas Szkopek;

  • 作者单位

    Dept. of Electrical and Computer Engineering, McGill University H3A 0E9, Montreal, Canada;

    Dept. de Chimie et Biochimie, Universite du Quebec a Montreal H3C 3P8, Montreal, Canada,Centre de Recherche sur les Nanomateriaux et l'Energie, NanoQAM, Universite du Quebec a Montreal, H3C 3P8, Montreal, Canada,Centre quebecois sur les materiaux fonctionnels (CQMF), Universite Laval Quebec,G1V 0A6, Quebec, Canada;

    Dept. de Chimie et Biochimie, Universite du Quebec a Montreal H3C 3P8, Montreal, Canada,Centre de Recherche sur les Nanomateriaux et l'Energie, NanoQAM, Universite du Quebec a Montreal, H3C 3P8, Montreal, Canada,Centre quebecois sur les materiaux fonctionnels (CQMF), Universite Laval Quebec,G1V 0A6, Quebec, Canada;

    Dept. of Electrical and Computer Engineering, McGill University H3A 0E9, Montreal, Canada,Centre quebecois sur les materiaux de pointe (RQMP), Universite de Montreal H3C 3J7, Montreal, Canada;

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  • 正文语种 eng
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  • 关键词

    graphene; Golay; suspended; membrane; THz; infrared; room-temperature; detector;

    机译：石墨烯戈莱暂停膜;太赫兹红外线;室内温度;探测器;

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