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Microfabrication and cold testing of copper circuits for a 50 Watt, 220 GHz traveling wave tube

机译:50瓦,220 GHz行波管的铜电路的微细加工和冷测试

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We present the microfabrication and cold test measurement results of serpentine waveguide amplifier circuits at 220 GHz. The circuits were fabricated using a novel embedded polymer monofilament technique combined with Ultraviolet-LIGA to simultaneously create both the beam tunnel and interaction circuits. We find remarkable characteristic matches between the measurements of the best circuits, illustrating that the process developed is able to create repeatable, highly precise circuits with high yield. It was found that slight beam tunnel misalignment can cause very strong stopbands to appear in the operating band due to bi- or quasi-periodicity. The NRL code TESLA-SW/FW has been used to rapidly simulate the as-built structure under a variety of conditions to accurately predict the performance with an electron beam. The tolerances needed on beam tunnel alignment are studied, with implications extending to the THz range.
机译:我们介绍了蛇形波导放大器电路在220 GHz时的微加工和冷测试测量结果。电路是使用新颖的嵌入式聚合物单丝技术与Ultraviolet-LIGA结合制造的,可同时创建束隧道和相互作用电路。我们在最佳电路的测量之间发现了显着的特性匹配,这说明开发的工艺能够以高良率创建可重复的高精度电路。已经发现,由于双周期或准周期,轻微的光束隧道失准会导致非常强的阻带出现在工作频带中。 NRL代码TESLA-SW / FW已用于在各种条件下快速模拟完工结构,以准确预测电子束的性能。研究了束隧道对准所需的公差,其含义已扩展到太赫兹范围。

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