• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Terahertz, RF, millimeter, and submillimeter-wave technology and applications VI >High sensitivity metamaterial based bi-material terahertz sensor
【24h】

High sensitivity metamaterial based bi-material terahertz sensor

机译：基于高灵敏度超材料的双材料太赫兹传感器

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We report on the fabrication of a microelectromechanical systems (MEMS) based bi-material terahertz (THz) detector integrated with a metamaterial structure to provide high absorption at 3.8 THz. The absorbing element of the sensor was designed with a resonant frequency that matches the quantum cascade laser illumination source, while simultaneously providing structural support, desired thermomechanical properties and optical read-out access. It consists of a periodic array of aluminum squares separated from a homogeneous aluminum (Al) ground plane by a silicon-rich silicon oxide (SiO_x) layer. The absorbing element is connected to two Al/SiO_x microcantilevers (legs), anchored to a silicon substrate, which acts as a heat sink, allowing the sensor to return to its unperturbed position when excitation is terminated. The metamaterial structure absorbs the incident THz radiation and transfers the heat to the legs where the significant difference between thermal expansion coefficients of Al and SiO_x causes the structure to deform proportionally to the absorbed power. The amount of deformation is probed optically by measuring the displacement of a laser beam reflected on the Al ground plane of the metamaterial absorber. Measurement showed that the fabricated absorber has nearly 95% absorption at 3.8 THz. The responsivity and time constant were found to be 1.2 deg/uW and 0.3 s, respectively. The minimum detectable incident power including the readout noise is around 9 nW. The obtained high sensitivity and design flexibility indicate that sensor can be further tuned to achieve the required parameters for real time THz imaging applications.
机译：我们报告了基于微机电系统（MEMS）的双材料太赫兹（THz）检测器的制造，该检测器与超材料结构集成在一起，可提供3.8 THz的高吸收。传感器的吸收元件设计为具有与量子级联激光照明源相匹配的谐振频率，同时提供了结构支撑，所需的热机械特性和光学读取通道。它由铝方格的周期性阵列组成，铝方格的周期与均质的铝（Al）接地平面通过富硅氧化硅（SiO_x）层隔开。吸收元件连接到两个Al / SiO_x微悬臂（腿），并固定在用作散热片的硅基板上，当激发终止时，传感器可以返回到其不受干扰的位置。超材料结构吸收入射的太赫兹辐射并将热量传递到腿部，其中Al和SiO_x的热膨胀系数之间的显着差异会导致该结构与吸收的功率成比例地变形。通过测量在超材料吸收体的Al接地面上反射的激光束的位移，光学地探测变形量。测量表明，制成的吸收器在3.8 THz时具有近95％的吸收。发现响应度和时间常数分别为1.2 deg / uW和0.3 s。包括读出噪声在内的最小可检测入射功率约为9 nW。所获得的高灵敏度和设计灵活性表明，可以进一步调整传感器以实现实时THz成像应用所需的参数。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号