A practical approach to understanding surface metrology and its applications

机译：一种了解表面计量学及其应用的实用方法

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The basics of surfacemetrology are presented, emphasizing the importance of understanding scales of interaction in surface creation, behavior, measurement and analysis. Conventional and scale-sensitive fractal analysis are discussed with respect to the clarity of the physical interpretation for specific applications. The concept of information content is presented as a method for selecting texture characterization parameters, along with statistical testing.

机译：介绍了表面计量学的基础知识，强调了理解相互作用量表在表面创建，行为，测量和分析中的重要性。关于特定应用的物理解释的清晰度，讨论了常规的和对比例敏感的分形分析。提出了信息内容的概念，作为选择纹理特征参数的方法以及统计测试。

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《third annual Atomic Force Microscopy/Scanning Tunneling Microscopy Symposium at the Omni Inner Harbor Hotel in Baltimore, Maryland, from May 9 to 12, 1998.》|1998年|p.1-10|共10页
会议地点 Baltimore MD(US);Baltimore MD(US)
作者
Christopher A. Brown;
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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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A practical approach to understanding surface metrology and its applications

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