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The Design and Fabrication of a Silicon Backplane Spatial Light Modulatro for Silicon-transparent 1.5#mu#m IR Quaternary Operation

机译:用于硅透明的1.5#mu#m红外四元运算的硅背板空间光调制器的设计与制造

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Optoelectronic modules with embedded silicon drivign capability are important components fro optical beam-steering and switching aplications. There have been numerous optical modulation technologies capable of monolithic or hybrid integratio iwth silicon drive electronics using Complementary Metal-Oxide-Silicon(CMOS) Very Large Scale Integrated(VLSI) circuits in order to achieve low cost production and dense circuit elemnets. Gallium Arsenide(GaAs) multiple quantum well(MQW) modulators[1] and planar lighwave circuits(PLC) based on silica/sillicon waveguides[2] are in an advanced state of development. The former, though ultra-fast, has to bear the cost of expensive flipchip bonding and the latter is compatible with silicon processing but lacks the density of free-space interconnects.
机译:具有嵌入式硅驱动能力的光电模块是光束转向和切换应用的重要组件。为了实现低成本生产和密集电路元件,已经存在许多能够使用互补金属氧化物硅(CMOS)超大规模集成电路(VLSI)的单片或混合集成硅驱动电子器件的光调制技术。砷化镓(GaAs)多量子阱(MQW)调制器[1]和基于二氧化硅/硅波导的平面光波电路(PLC)[2]处于发展中。前者虽然超快,但必须承担昂贵的倒装芯片键合的成本,而后者与硅工艺兼容,但缺乏自由空间互连的密度。

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