BULIDING MICROSTRUCTURES OF ORGANIZED CARBON NANOTUBES BY CHEMICAL VAPOR DEPOSITION

机译：化学气相沉积法构建有机碳纳米管的微观结构

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Chemical vapor deposition (CVD) using ferrocene (Fe(C_5H_5)_2) and xylene (C_8H_(10)) is frequently employed to fabricate, and to investigate the growth mechanism of nanotubes on planar substrates. The growth of carbon nanotubes by this approach, as we observed, showed interesting self-organization behaviors at early growth stages, which is closely related to the ratio of catalyst over carbon in the depositing vapor and to the growth kinetics of CNTs. Investigation on the very early deposition stages of this CVD method demonstrated that, the self-organization of carbon nanotubes is determined by the way that the catalyst particles adhere to the substrate surface, and the growth kinetics following. By adjusting these factors at the early deposition stages, we successfully fabricated different microstructures of carbon nanotubes and continuous films of CNTs on flat silicon substrates. This provides ways to control the growth and self-organization of carbon nanotubes.

机译：使用二茂铁（Fe（C_5H_5）_2）和二甲苯（C_8H_（10））的化学气相沉积（CVD）经常用于制造，并研究纳米管在平面基板上的生长机理。正如我们所观察到的，通过这种方法进行的碳纳米管的生长在早期的生长阶段显示出有趣的自组织行为，这与沉积蒸气中催化剂与碳的比例以及CNT的生长动力学密切相关。对这种CVD方法的非常早期的沉积阶段的研究表明，碳纳米管的自组织是由催化剂颗粒粘附到基材表面的方式以及随后的生长动力学决定的。通过在沉积的早期阶段调整这些因素，我们成功地在平坦的硅基板上制造了不同的微结构的碳纳米管和连续的CNT膜。这提供了控制碳纳米管生长和自组织的方法。

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来源
《TMS(The Minerals, Metals amp; Materials Society) Annual Meeting and Symposium on Surfaces and Interfaces in Nanostructured Materials and Trends in LIGA, Miniaturization, and Nanoscale Materials; 20040314-20040318; Charlotte,NC; US》|2004年|P.221-232|共12页
会议地点 Charlottee NC(US);Charlottee NC(US)
作者
Zhengjun Zhang; Ye Zhao; Ya Zhou;
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作者单位

Tsinghua University, Dept. of Matls. Sci. Engrg., Beijing 100084 China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类工程材料一般性问题;
关键词
CNTs; CVD; self-organization;

机译：碳纳米管; CVD;自组织;

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5. Chemical vapor deposition of single-walled carbon nanotubes and single-walled carbon nanotube chemical sensors. [D] . Fu, Qiang. 2005

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6. On the Growth and Microstructure of Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition [O] . Sangeeta Handuja, P Srivastava, VD Vankar 2010

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7. Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition [O] . Kim Ki Hwan, Lefeuvre Emmanuel, Chatelet Marc, 2011

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8. Oxidation Protection Systems for Carbon-Carbon Composites Formed by Chemical Vapor Deposition and Plasma Assisted Chemical Vapor Deposition Techniques. [R] . Shi, Y., Stojak, J., He, J., 1992

机译：化学气相沉积和等离子体辅助化学气相沉积技术形成的碳 - 碳复合材料氧化保护系统。

BULIDING MICROSTRUCTURES OF ORGANIZED CARBON NANOTUBES BY CHEMICAL VAPOR DEPOSITION

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