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首页> 外文会议>TMS(The Minerals, Metals amp; Materials Society) Annual Meeting and Symposium on Surfaces and Interfaces in Nanostructured Materials and Trends in LIGA, Miniaturization, and Nanoscale Materials; 20040314-20040318; Charlotte,NC; US >CRITICAL FACTORS THAT DETERMINE FCC TO BCC PHASE TRANSFORMATION IN SPUTTER DEPOSITED AUSTENITIC STAINLESS STEEL FILMS
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CRITICAL FACTORS THAT DETERMINE FCC TO BCC PHASE TRANSFORMATION IN SPUTTER DEPOSITED AUSTENITIC STAINLESS STEEL FILMS

机译：决定从溅射沉积的奥氏体不锈钢薄膜中FCC到BCC相变的关键因素

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摘要

Bulk austenitic stainless steels (SS) have face centered cubic (fcc) structure. However, sputter deposited films synthesized using austenitic stainless steel targets usually exhibit body centered cubic (bcc) structure or a mixture of fcc and bcc phases. This paper presents studies on the effect of processing parameters on the phase stability of 304 and 330 SS thin films. 304 SS thin films with in-plane, biaxial residual stresses in the range of ～ 1 GPa (tensile) to ～ 300 MPa (compressive) exhibited only bcc structure. The retention of bcc 304 SS after high temperature annealing followed by slow furnace cooling indicates depletion of Ni in as-sputtered 304 SS films. 330 SS films sputtered at room temperature possess pure fcc phase. The Ni content and the substrate temperature during deposition are crucial factors in determining the phase stability in sputter deposited austenitic SS films.
机译：大块奥氏体不锈钢（SS）具有面心立方（fcc）结构。但是，使用奥氏体不锈钢靶材合成的溅射沉积膜通常显示出体心立方（bcc）结构或fcc和bcc相的混合物。本文介绍了工艺参数对304和330 SS薄膜相稳定性的影响。面内双轴残余应力在〜1 GPa（拉伸）至〜300 MPa（压缩）范围内的304 SS薄膜仅表现出bcc结构。高温退火后缓慢加热炉冷却后，bcc 304 SS的保留表明溅射的304 SS膜中的Ni耗尽。在室温下溅射的330 SS膜具有纯fcc相。沉积期间的镍含量和衬底温度是决定溅射沉积的奥氏体SS膜的相稳定性的关键因素。

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