Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques

机译：电子和质谱技术的表面和薄膜分析

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

We give a short overview of recent analytical techniques for compositional surface analysis and the determination of concentration depth profiles. More specifically, the principle, the instrumentation and the performance of the routinely used electron spectroscopic and mass spectrometric methods, namely Photo- and Auger Electron Spectroscopy PES and AES, resp. Secondary Ion and Secondary Neutral Mass Spectrometry SIMS and SNMS, are described. The application of these techniques to the analysis of thin film structures is demonstrated by corresponding practical examples. The potentialities of the different techniques are specifically addressed with regard to the quantitation of the measured data, detection limits for trace analysis as well as the spatial resolution both in directions parallel and perpendicular to the sample surface.

机译：我们简要概述了成分表面分析和浓度深度分布测定的最新分析技术。更具体地说，分别是常规使用的电子光谱和质谱方法的原理，仪器和性能，分别是光电和俄歇电子能谱PES和AES。描述了二次离子和二次中性质谱SIMS和SNMS。这些技术在薄膜结构分析中的应用通过相应的实例进行了演示。在测量数据的定量，痕量分析的检测极限以及与样品表面平行和垂直的方向上的空间分辨率方面，专门解决了不同技术的潜力。

著录项

来源
《Trends and new applications of thin films》|1998年|61-84|共24页
会议地点 Regensburg(DE);Regensburg(DE)
作者
A. Wucher;
展开▼
作者单位

Fachbereich Physik, Universitaet Kaiserslautern, D-67653 Kaiserslautern, Germany;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类薄膜物理学;
关键词
analysis; electron spectroscopy; mass spectroscopy;

机译：分析;电子光谱质谱;

相似文献

外文文献
中文文献
专利

1. Enhanced surface sensitivity in secondary ion mass spectrometric analysis of organic thin films using size-selected Ar gas-cluster ion projectiles [J] . Tanaka M, Moritani K, Hirota T, Rapid Communications in Mass Spectrometry: RCM . 2010,第10期

机译：使用尺寸选择的Ar气体簇离子弹丸对有机薄膜进行二次离子质谱分析时提高了表面灵敏度
2. Enhancement of Sensitivity and Resolution of Surface-Enhanced Laser Desorption/Ionization Time-of-Flight Mass Spectrometric Records for Serum Peptides Using Time-Series Analysis Techniques [J] . Bao-Ling Adam, Dariya I. Malyarenko, Dennis M. Manos, Clinical Chemistry: Journal of the American Association for Clinical Chemists . 2005,第1期

机译：使用时间序列分析技术提高血清肽的表面增强激光解吸/电离飞行时间质谱记录的灵敏度和分辨率
3. Mass-Spectrometric Diagnostics of Operation of a Thin-Film Field-Electron Emitter Based on a Polymer-Carbon Nanotube Composition [J] . Pozdnyakov OF, Popov EO, Latypov ZZ, Technical physics letters: Letters to the Russian journal of applied physics . 2009,第8期

机译：基于高分子碳纳米管成分的薄膜场电子发射体的质谱诊断
4. Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques [C] . International symposium on trends and new applications of thin films;TATF '98 . 1998

机译：用电子和质谱技术表面和薄膜分析
5. Applications of molecular beams: Production of metal oxide thin films and mass spectrometrical study of gas phase clusters. [D] . Chiang, Chi-Tung. 2007

机译：分子束的应用：金属氧化物薄膜的生产和气相团簇的质谱研究。
6. Enhancement of Sensitivity and Resolution of Surface-Enhanced Laser Desorption/Ionization Time-of-Flight Mass Spectrometric Records for Serum Peptides Using Time-Series Analysis Techniques [O] . Dariya I. Malyarenko, William E. Cooke, Bao-Ling Adam, -1

机译：使用时间序列分析技术提高血清肽的表面增强激光解吸/电离飞行时间质谱记录的灵敏度和分辨率
7. Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques [O] . A. Wucher, Fachbereich Physik, Universität Kaiserslautern, 2015

机译：用电子和质谱技术分析表面和薄膜
8. Mass Spectral Investigations on Toxins. 6. Direct and Accurate Analysis of Stachybotrys atra Samples by Negative Ion Tandem Mass Spectrometric Techniques [R] . Krishnamurthy, T., Sarver, E. W. 1987

机译：毒素的质谱研究。 6.通过负离子串联质谱技术直接和准确地分析stachybotrys atra样品

Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques

摘要

著录项

相似文献

相关主题

期刊订阅