MEASUREMENT AND COMPENSATION OF A 4 AXIS ULTRA-PRECISION MACHINE TOOL FOR GENERATING MICRO PATTERNS ON THE LARGE SURFACES

机译：用于在大表面上生成微图案的4轴超精密机床的测量和补偿

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This paper describes a method to measure and compensate a 4 axes ultra-precision machine tool that generates micro patterns on the large surfaces. To make a two dimensional positioning error, straightness of two axes in out of plane, squareness between the each axis are important. Positioning errors, straightness and squamess were measured by laser interferometer system. One of difficult problem to measure the error motions is squareness or parallelism of axis between the rotational table and linear axis. It was investigated by self-cutting of turning against each moving axis and calculated by waveness data from surface roughness tester. This error was compensated by command of Z-axis motion.

机译：本文介绍了一种测量和补偿4轴超精密机床的方法，该机床在大表面上会产生微细图案。为了产生二维定位误差，两个轴在平面外的直线度，每个轴之间的垂直度很重要。通过激光干涉仪系统测量定位误差，直线度和方差。测量误差运动的困难问题之一是旋转工作台与线性轴之间的轴的垂直度或平行度。通过对每条运动轴进行自动切割来进行研究，并通过表面粗糙度测试仪的波形数据进行计算。该误差通过Z轴运动指令得到补偿。

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来源
《The Twenty-third annual meeting of the American Society of Precision Engineering and the Twelfth ICPE》|2008年|460-463|共4页
会议地点 Portland OR(US);Portland OR(US);Portland OR(US);Portland OR(US)
作者
Jooho Hwang; YoungChan Song; Chang-Kyu Song; Chun-Hong Park;
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作者单位

Intelligent Manufacturing system division Korea Institute of Machinery and Materials Daejeon, South Korea;

Intelligent Manufacturing system division Korea Institute of Machinery and Materials Daejeon, South Korea;

Intelligent Manufacturing system division Korea Institute of Machinery and Materials Daejeon, South Korea;

Intelligent Manufacturing system division Korea Institute of Machinery and Materials Daejeon, South Korea;

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原文格式 PDF
正文语种 eng
中图分类仪器、仪表;
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5. Minimum error tool path generation method and an interpolator design technique for ultra-precision multiaxis CNC machining [D] . Liang, Hong 1999

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7. Tool path generation for machining of optical freeform surfaces by an ultra-precision multiaxis machine tool [O] . Gao D, To S, Lee WB 2006

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MEASUREMENT AND COMPENSATION OF A 4 AXIS ULTRA-PRECISION MACHINE TOOL FOR GENERATING MICRO PATTERNS ON THE LARGE SURFACES

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