PIEZO DRIVEN XY STAGE WITH NANO-MANIPULATORS FOR SEM OPERATION

著录项

• 来源
  《The Twenty-third annual meeting of the American Society of Precision Engineering and the Twelfth ICPE》|2008年|249-252|共4页
• 会议地点 Portland OR(US);Portland OR(US);Portland OR(US);Portland OR(US)
• 作者

  Shunsuke Kanegae; Chiba Hiroyuki; Hisayuki Aoyama; Yuka Irie; Futoshi Iwata; Tatsuo Ushiki;

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• 作者单位

  Mechanical Engineering and Intelligent Systems The University of Electro-Comunications, Chofu, Tokyo, Japan;

  Mechanical Engineering and Intelligent Systems The University of Electro-Comunications, Chofu, Tokyo, Japan;

  Mechanical Engineering and Intelligent Systems The University of Electro-Comunications, Chofu, Tokyo, Japan;

  Mechanical Engineering and Intelligent Systems The University of Electro-Comunications, Chofu, Tokyo, Japan;

  Faculty of Engineering Shizuoka University Hamamatsu, Shizuoka, Japan;

  Graduate School of Medical and Dental Sciences, Niigata University Niigata, Niigata, Japan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 仪器、仪表;
• 关键词