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Submicron Lateral Scaling of Vertical-Transport devices Transferred-Substrate Bipolar Transistors and Schottky-Collecto Tunnel Diodes

机译:垂直传输器件的亚微米横向缩放比例转移衬底双极晶体管和肖特基-Collecto隧道二极管

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摘要

Transferred-substrate HBTs, fabricated with 0.7 micron emitters and 1.6 micron collectors, obtain 277 GHz power-gain cutoff frequencies f_max. At 0.1 #mu#m lithography, the device should obtain approx 500 GHz f_max. Deep submicron Schottky-collector resonant tunnel diodes (SRTDs) have estimated 2.2 THz cutoff frequencies. 64-element monolithic SRTD array osicllated at 650 GHz.
机译:由0.7微米发射极和1.6微米集电极组成的转移衬底HBT获得277 GHz的功率增益截止频率f_max。在0.1#μm的光刻条件下,该设备应获得约500 GHz f_max。深亚微米肖特基集电极谐振隧道二极管(SRTD)的截止频率估计为2.2 THz。振荡频率为650 GHz的64元素单片SRTD阵列。

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