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首页> 外文会议>Frontiers in ultrafast optics: biomedical, scientific, and industrial applications XVIII >Rapid Prototyping of 2D Glass Microfluidic Devices Based on Femtosecond Laser Assisted Selective Etching Process
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Rapid Prototyping of 2D Glass Microfluidic Devices Based on Femtosecond Laser Assisted Selective Etching Process

机译：基于飞秒激光辅助刻蚀的二维玻璃微流控设备快速原型制作

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摘要

Microfluidics technology that deals with small liquid samples and reagents within micro-scale channels has been widely applied in various aspects of biological, chemical, and life-scientific research. For fabricating microfluidic devices, a silicon-based polymer, PDMS (Polydimethylsiloxane), is widely used in soft lithography, but it has several drawbacks for microfluidic applications. Glass has many advantages over PDMS due to its excellent optical, chemical, and mechanical properties. However, difficulties in fabrication of glass microfluidic devices that requires multiple skilled steps such as MEMS technology taking several hours to days, impedes broad application of glass based devices. Here, we demonstrate a rapid and optical prototyping of a glass microfluidic device by using femtosecond laser assisted selective etching (LASE) and femtosecond laser welding. A microfluidic droplet generator was fabricated as a demonstration of a microfluidic device using our proposed prototyping. The fabrication time of a single glass chip containing few centimeter long and complex-shaped microfluidic channels was drastically reduced in an hour with the proposed laser based rapid and simple glass micromachining and hermetic packaging technique.
机译：处理微尺度通道内的少量液体样品和试剂的微流体技术已广泛应用于生物学，化学和生命科学研究的各个方面。对于制造微流体装置，硅基聚合物PDMS（聚二甲基硅氧烷）被广泛用于软光刻中，但是对于微流体应用它具有一些缺点。玻璃具有优异的光学，化学和机械性能，因此与PDMS相比具有许多优势。然而，玻璃微流体装置的制造中的困难需要数小时至数天的诸如MEMS技术之类的多个熟练步骤，阻碍了基于玻璃的装置的广泛应用。在这里，我们演示了通过使用飞秒激光辅助选择性蚀刻（LASE）和飞秒激光焊接对玻璃微流控设备进行快速且光学的原型制作。使用我们提出的原型制造了微流体液滴发生器，作为微流体设备的演示。利用所提出的基于激光的快速，简单的玻璃微机械加工和气密封装技术，一个小时内就可以大大减少包含几个厘米长且形状复杂的微流体通道的单个玻璃芯片的制造时间。

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