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Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides

机译:用于液核ARROW波导中单分子检测的SiN纳米孔的集成和表征

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摘要

We demonstrate a method for integrating silicon nitride nanopores in liquid core Anti Resonant Reflecting Optical Waveguides (ARROW) for single molecule electrical detection and control. We use a two-step integration process when a micropore is fabricated first, paving the way for subsequent nanopore integration in the first silicon nitride layer of the ARROW structure. Nanopores with dimensions as small as 11 nm were fabricated using a Focused Ion Beam shrinking process commensurate with single particle gating of viruses, proteins, ribosomes and other biomolecules.
机译:我们展示了一种在液芯反共振反射光波导(ARROW)中集成氮化硅纳米孔的方法,用于单分子电检测和控制。当首先制造微孔时,我们使用两步集成过程,为后续在ARROW结构的第一氮化硅层中进行纳米孔集成铺平了道路。使用聚焦离子束收缩工艺与病毒,蛋白质,核糖体和其他生物分子的单粒子门控相称,制造了尺寸小至11 nm的纳米孔。

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