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Small-Sized Lithographic Single-Mode VCSELs with High Power Conversion Efficiency

机译：具有高功率转换效率的小型光刻单模VCSEL

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摘要

Small, single mode VCSELs have been pursued almost since the inception of the device, but have been difficult to realize. Here we present data on lithographic and oxide-free VCSELs as small as 2 μm in diameter that produce single transverse mode powers of 8 mW and have high efficiency. The efficiencies reach 46% power conversion with greater than 73 % slope efficiency, with threshold current as low as 300 μA. Smaller VCSELs of 1 μm diameter produce 37 % power conversion efficiency with greater than 79 % slope efficiency, and single mode power over 5 mW. The keys to the high performance are the lithographic control and oxide elimination that reduce the electrical and thermal resistances.
机译：自设备问世以来，一直在追求小型单模VCSEL，但很难实现。在这里，我们介绍了直径小至2μm的光刻和无氧化物VCSEL的数据，这些VCSEL产生的单横模功率为8 mW，效率很高。效率达到46％的功率转换，斜率效率超过73％，阈值电流低至300μA。直径为1μm的较小VCSEL产生37％的功率转换效率，斜率效率大于79％，单模功率超过5 mW。高性能的关键是光刻控制和消除氧化物，以减少电阻和热阻。

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  • 来源
    《Vertical-Cavity surface-emitting lasers XIX》|2015年|93810R.1-93810R.6|共6页
  • 会议地点 San Francisco CA(US)
  • 作者

    Xu Yang; Mingxin Li; Guowei Zhao; Yu Zhang; Sabine Freisem; Dennis Deppe;

  • 作者单位

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

    CREOL, The College of Optics and Photonics, Univ. of Central Florida, Orlando, FL, USA 32816;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Semiconductor lasers; VCSEL; reliability;

    机译：半导体激光器； VCSEL；可靠性;

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