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Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions

机译:高沟槽频率光栅在软X射线和XUV区域的非标量特性

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Abstract: It was found that grating efficiency in short spectral range has unpredictable changes both under the alterations in groove geometry, groove frequency, angle of incidence and wavelength; and under replacement of reflectance, i.e. under the use of another coating material with the stand point of scalar theory. As is shown, this non-scalar effect becomes greatly apparent only for high-frequency gratings (up to 3600 g/mm) and includes two aspects. They are: (1) it is impossible to predict grating efficiency under the changing of coating material (without changes of all the other parameters) by multiplication on the ratio of coating material Fresnel reflectance; (2) optimum parameters (angle of incidence, groove depth, groove width for lamellar grating) found for one kind of coating material are not optimum for another. !7
机译:摘要:发现在沟槽几何形状,沟槽频率,入射角和波长的变化下,短光谱范围内的光栅效率都有不可预测的变化。在更换反射率的情况下,即在使用具有标量理论立场的另一种涂层材料的情况下。如图所示,这种非标量效应仅在高频光栅(最大3600 g / mm)上变得非常明显,并且包括两个方面。它们是:(1)不可能通过乘以涂层材料的菲涅耳反射率来预测在涂层材料变化(不改变所有其他参数)下的光栅效率; (2)对一种涂料发现的最佳参数(入射角,凹槽深度,层状光栅的凹槽宽度)对另一种涂料不是最佳的。 !7

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