• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>XXVIII international conference on phenomena in ionized gases : Book of abstracts >Evaluation of EEDF in Microwave Discharge Plasma by Spectroscopic Characteristics
【24h】

Evaluation of EEDF in Microwave Discharge Plasma by Spectroscopic Characteristics

机译：光谱特性评价微波放电等离子体中的EEDF

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The influence of electron energy distribution function (EEDF) on excited states distribution is investigated in 2.45 GHz microwave surface wave Ar and He plasma sustained at discharge pressure 1-5 Torr. The EEDF is measured with Langmuir probe by Druyvesteyns method and used as the input parameter of the collisional-radiative (CR) model calculation. The calculated population density of the excited states is compared with the results of optical emission spectroscopic measurement. Rough agreement is obtained between them. It is also confirmed that the measured EEDFs depleted above the first excitation potential of discharge gas atoms. When we assume a Maxwellian EEDF and calculate population distribution of excited states of helium and argon plasmas, we find remarkable discrepancy between the excited states populations observed experimentally and that calculated by the CR model.
机译：在放电压力为1-5 Torr的条件下，在2.45 GHz微波表面波Ar和He等离子体中研究了电子能量分布函数（EEDF）对激发态分布的影响。 EEDF使用Langmuir探针通过Druyvesteyns方法进行测量，并用作碰撞辐射（CR）模型计算的输入参数。将计算出的激发态的人口密度与光发射光谱测量的结果进行比较。他们之间获得了粗略的协议。还可以确定，测得的EEDF耗尽了放电原子的第一激发电势。当我们假设麦克斯韦式EEDF并计算氦和氩等离子体激发态的种群分布时，我们发现实验观察到的激发态种群与CR模型计算出的激发态种群之间存在显着差异。

著录项

  • 来源
  • 会议地点 Prague(CZ);Prague(CZ)
  • 作者

    J. Mizuochi; H. Matsuura; H. Akatsuka;

  • 作者单位

    Department of Energy Sciences, 2-12-1-N1-10, O-Okayama, Meguro-ku, Tokyo 152-8550,Japan;

    rnResearch Laboratory for Nuclear Reactors, 2-12-1-N1-10, O-Okayama, Meguro-ku, Tokyo 152-8550,Japan;

    Department of Energy Sciences, 2-12-1-N1-10, O-Okayama, Meguro-ku, Tokyo 152-8550,JapanrnResearch Laboratory for Nuclear Reactors, 2-12-1-N1-10, O-Okayama, Meguro-ku, Tokyo 152-8550,Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号