首页> 外文会议>XXVIII international conference on phenomena in ionized gases : Book of abstracts >One more mechanism leading to the hysteresis of the RF inductivedischarge transition from low to high density mode
【24h】

One more mechanism leading to the hysteresis of the RF inductivedischarge transition from low to high density mode

机译:导致射频感应放电从低密度模式过渡到高密度模式的滞后现象的另一种机制

获取原文
获取原文并翻译 | 示例

摘要

The mechanism leading to the hysteresis of the RF inductive discharge transition from low to highrndensity mode is considered.In case of the low pressure inductive discharge located in the externalrnmagnetic field the hysteresis was found studying experimentally the dependencies of the plasmarndensity on the value of magnetic field and power of the RF source.The numerical simulationrnbased on the self-consistent discharge model showed the existence of the nonlinear dependence ofrnthe power absorption efficiency (plasma equivalent resistance)on electron density and magneticrnfield value.Hysteresis appears under conditions that antenna resistance is higher than equivalentrnplasma one.
机译:考虑了导致射频感应放电从低密度模式过渡到高密度模式的磁滞的机理。在外部磁场中存在低压感应放电的情况下,通过实验研究了等离子体密度对磁场值的依赖性,发现了磁滞现象。基于自洽放电模型的数值模拟表明,功率吸收效率(等离子体等效电阻)与电子密度和磁场强度存在非线性相关性。在天线电阻高于等效血浆

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号