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Encapsulated sub-millimeter piezoresistive accelerometers for biomedical applications.

机译：用于生物医学应用的封装式亚毫米压阻式加速度计。

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Micromachined accelerometers have been introduced in the late 1970s and have been used in various applications. The applications range from inertial navigation and data logging in wells to body activity monitoring for pacemakers. Although the size of the accelerometers was sufficient for their applications, there were not many efforts in pushing the limits of accelerometer miniaturization. In this study, we utilized film deposition packaging technology and other modern microfabrication techniques to miniaturize the size and mass of the packaged accelerometers, two orders of magnitude smaller than any accelerometers ever reported. We used these ultra miniature accelerometers to offer sensing capabilities for biomedical applications which was not possible with any other means.; A novel design of the accelerometer and packaging has been developed for miniaturization. The accelerometer consists of a proof mass suspended by a single high-aspect-ratio beam attached to the substrate. Piezoresistors are implanted on the sidewall of the beam to sense the maximum stress applied on the beam. A thick layer of epitaxial silicon is deposited on the accelerometer to form a mechanically robust yet compact package. The new packaging method enables reduction in die area up to 70% compared to conventional wafer bonded package. A new polyimide flexible circuit is also developed to route the signals from the ultra-miniature accelerometers to a conventional package.; The new technology is used in experimental biomedical applications. The accelerometer is evaluated as an implantable sound sensor for cochlear implants which can possibly replace the externally worn microphones. It is also used as an electrical stethoscope to measure respiratory and heart signal of neonatal mice. There are many other possible applications in the biomedical field such as imaging artifact reduction for live animal microendoscopy. This technology has the potential to open up new realms of motion sensing in the biomedical science and engineering.
机译：1970年代末期推出了微机械加速度计，并已用于各种应用中。应用范围从惯性导航和井中数据记录到起搏器的身体活动监测。尽管加速度计的尺寸足以满足其应用需求，但在推动加速度计小型化的极限方面并没有付出太多努力。在这项研究中，我们利用薄膜沉积包装技术和其他现代微细加工技术来使包装的加速度计的尺寸和质量最小化，这比以往报道的任何加速度计都要小两个数量级。我们使用这些超小型加速度计为生物医学应用提供传感功能，这是其他任何方式都无法实现的。为了小型化，已经开发了加速度计和包装的新颖设计。加速度计由附着在基板上的单个高纵横比梁悬挂的检测质量组成。压敏电阻被植入到梁的侧壁上，以感应施加在梁上的最大应力。在加速计上沉积一层厚的外延硅，以形成机械坚固但紧凑的封装。与传统的晶圆键合封装相比，新的封装方法可使芯片面积减少多达70％。还开发了一种新的聚酰亚胺柔性电路，用于将信号从超小型加速度计传递到常规封装。这项新技术用于实验性生物医学应用。加速度计被评估为用于耳蜗植入物的可植入声音传感器，该声音传感器可能可以代替外戴麦克风。它也可以用作电子听诊器来测量新生小鼠的呼吸和心脏信号。在生物医学领域还有许多其他可能的应用，例如用于活体动物显微内窥镜检查的成像伪影减少。这项技术有可能在生物医学科学和工程领域开拓运动传感的新领域。

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