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Applications of micromachining and MEMS technology in microfluidics .

机译：微加工和MEMS技术在微流体中的应用。

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摘要

The dissertation research is to use micromachining and Micro-Electro-Mechanical Systems (MEMS) technology in microfluidic applications. Two core microfluidic devices, a piezoelectrically actuated check valve diaphragm micropump to precisely delivery small volume liquid or gases and a real time continuous flow through polymerase chain reaction (PCR) chip for DNA amplifications, have been developed.; The piezoelectrically actuated micropump is made from two Silicon-on-Insulator (SOI) wafers and one general silicon wafer with only four photomasks. The core components of the micropump, the two one-way microvalves, the diaphragm, and the chamber, mainly are formed from technique of SOI/SOI bonding and etching back followed by a second bonding. The piezoelectrically actuated diaphragm is optimized using finite element analysis (FEA) software ANSYS. Driven by Vpp 320V (peak-to-peak voltage), the fabricated micropump (14.5mmx9mmx1.1mm) is able to self prime. The pumping rate of the micropump linearly increases when its driven frequency increases from 0 to 125Hz with the same amplitude voltage. Its maximum pumping pressure is about 11psi when it is driven by Vpp 240V square waves in the linear frequency range. The power consumption of the device is less than 1.2mW when driven by square waves at 100Hz with 50% duty cycle and Vpp 240V. The tested stroke volume and the maximum pumping pressure of the micropump both agree to predictions by FEA.; A continuous flow through PCR chip is made from two Pyrex 7740 wafers and one silicon wafer. The serpentine microchannels are made in the middle Pyrex wafer and sealed by the bottom Pyrex wafer with flow inlet and outlet ports. Three silicon pieces integrated with platinum heaters and temperature sensors are bonded to the top of the middle Pyrex wafer. The application of the PCR is that when the DNA sample passes through three heated zones along the serpentine microchannels, the targeted strand of DNA is doubled. In our design, the three silicon pieces are not directly connected. Electrical-thermal coupled-field simulation tool ANSYS is used in optimization. The PCR chip offers two optical transparent windows which provide the possibility of using fluorescent real time detection method. We also have developed a simple and energy saving packaging method: metal wires are soldered to the electrical pads which can directly be plugged into a breadboard or a printed circuit board (PCB). Both infrared (IR) image and simulation show that the chip has desired temperature profiles. The power consumption is confirmed close to our simulation. The adapted PCR chip successfully amplified DNA.
机译：论文的研究方向是在微流体应用中运用微加工和微机电系统技术。已经开发出两个核心的微流体装置，一个压电致动的止回阀隔膜微型泵，可精确输送少量液体或气体，以及通过聚合酶链反应（PCR）芯片实时连续流动以进行DNA扩增。压电驱动的微型泵由两个绝缘体上硅（SOI）晶片和一个只有四个光掩模的普通硅晶片制成。微型泵的核心组件，两个单向微型阀，膜片和腔室，主要是通过SOI / SOI粘合和回蚀后再进行第二次粘合的技术形成的。使用有限元分析（FEA）软件ANSYS对压电驱动隔膜进行了优化。由Vpp 320V（峰峰值电压）驱动，制造的微型泵（14.5mmx9mmx1.1mm）能够自吸。在相同幅度电压下，微型泵的驱动频率从0增加到125Hz时，微型泵的泵浦速率线性增加。由线性频率范围内的Vpp 240V方波驱动时，其最大泵送压力约为11psi。当以100Hz，占空比为50％，Vpp为240V的方波驱动时，该器件的功耗小于1.2mW。测试的冲程量和微型泵的最大泵送压力均符合FEA的预测。由两个Pyrex 7740晶片和一个硅晶片制成的连续流过PCR芯片。蛇形微通道在中间的耐热玻璃晶片中制成，并由带有流动入口和出口的底部耐热玻璃晶片密封。将三个与铂金加热器和温度传感器集成在一起的硅片粘合到中间的耐热玻璃晶片的顶部。 PCR的应用是，当DNA样品沿着蛇形微通道穿过三个加热区时，目标DNA链就会加倍。在我们的设计中，三个硅片没有直接连接。优化中使用了电热耦合场模拟工具ANSYS。 PCR芯片提供两个光学透明窗口，这提供了使用荧光实时检测方法的可能性。我们还开发了一种简单且节能的包装方法：将金属线焊接到电气垫上，然后将其直接插入面包板或印刷电路板（PCB）中。红外（IR）图像和仿真都表明该芯片具有所需的温度曲线。确认功耗接近我们的模拟。改装的PCR芯片成功扩增了DNA。

著录项

  • 作者

    Kang, Jianke.;

  • 作者单位

    Wayne State University.$bElectrical Engineering.;

  • 授予单位 Wayne State University.$bElectrical Engineering.;
  • 学科 Engineering Electronics and Electrical.; Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2006
  • 页码 171 p.
  • 总页数 171
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;机械、仪表工业;
  • 关键词

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